JPS6149248B2 - - Google Patents

Info

Publication number
JPS6149248B2
JPS6149248B2 JP54043234A JP4323479A JPS6149248B2 JP S6149248 B2 JPS6149248 B2 JP S6149248B2 JP 54043234 A JP54043234 A JP 54043234A JP 4323479 A JP4323479 A JP 4323479A JP S6149248 B2 JPS6149248 B2 JP S6149248B2
Authority
JP
Japan
Prior art keywords
boron
substrate
alloy
layer
structural material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54043234A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55136119A (en
Inventor
Hiroshi Yamazoe
Masaki Aoki
Shigeru Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4323479A priority Critical patent/JPS55136119A/ja
Publication of JPS55136119A publication Critical patent/JPS55136119A/ja
Publication of JPS6149248B2 publication Critical patent/JPS6149248B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP4323479A 1979-04-09 1979-04-09 Manufacture of boron structural material Granted JPS55136119A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4323479A JPS55136119A (en) 1979-04-09 1979-04-09 Manufacture of boron structural material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4323479A JPS55136119A (en) 1979-04-09 1979-04-09 Manufacture of boron structural material

Publications (2)

Publication Number Publication Date
JPS55136119A JPS55136119A (en) 1980-10-23
JPS6149248B2 true JPS6149248B2 (enrdf_load_stackoverflow) 1986-10-28

Family

ID=12658210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4323479A Granted JPS55136119A (en) 1979-04-09 1979-04-09 Manufacture of boron structural material

Country Status (1)

Country Link
JP (1) JPS55136119A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4856010B2 (ja) * 2007-06-04 2012-01-18 株式会社アルバック 触媒化学気相成長装置
WO2017148067A1 (zh) * 2016-03-01 2017-09-08 北京化工大学 一种层状非金属材料的制备方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216201A (en) * 1975-07-29 1977-02-07 Toshiba Corp Manufacturing method of pick-up cantilever

Also Published As

Publication number Publication date
JPS55136119A (en) 1980-10-23

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