JPS55136119A - Manufacture of boron structural material - Google Patents

Manufacture of boron structural material

Info

Publication number
JPS55136119A
JPS55136119A JP4323479A JP4323479A JPS55136119A JP S55136119 A JPS55136119 A JP S55136119A JP 4323479 A JP4323479 A JP 4323479A JP 4323479 A JP4323479 A JP 4323479A JP S55136119 A JPS55136119 A JP S55136119A
Authority
JP
Japan
Prior art keywords
alloy
layer
boron
boride
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4323479A
Other languages
Japanese (ja)
Other versions
JPS6149248B2 (en
Inventor
Hiroshi Yamazoe
Masaki Aoki
Shigeru Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4323479A priority Critical patent/JPS55136119A/en
Publication of JPS55136119A publication Critical patent/JPS55136119A/en
Publication of JPS6149248B2 publication Critical patent/JPS6149248B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To manufacture a boron structural material with superior mechanical strength in a high yield by chemically vacuum-depositing boron on a base material obtd. by forming a layer of a metal selected from Cr, Fe, Co and Ni, and alloy thereof or the boride of the metal or alloy on a ground. CONSTITUTION:On ground 1 made of Ta, Mo, W or the like layer 3 of a metal selected from Cr, Fe, Co and Ni, and boride thereof, an alloy of two or more of the metals, or the boride thereof is formed to obtain a base material. This material is placed in a reactor and covered with boron layer 2 by chemical vacuum deposition. When layer 3 is made of metal or alloy, during the deposition of layer 2 the metal or alloy is converted into its boride. Gap 4 is not always recognized. The base material is then removed by a chemical or mechanical method to manufacture a boron structural material.
JP4323479A 1979-04-09 1979-04-09 Manufacture of boron structural material Granted JPS55136119A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4323479A JPS55136119A (en) 1979-04-09 1979-04-09 Manufacture of boron structural material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4323479A JPS55136119A (en) 1979-04-09 1979-04-09 Manufacture of boron structural material

Publications (2)

Publication Number Publication Date
JPS55136119A true JPS55136119A (en) 1980-10-23
JPS6149248B2 JPS6149248B2 (en) 1986-10-28

Family

ID=12658210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4323479A Granted JPS55136119A (en) 1979-04-09 1979-04-09 Manufacture of boron structural material

Country Status (1)

Country Link
JP (1) JPS55136119A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008300793A (en) * 2007-06-04 2008-12-11 Ulvac Japan Ltd Catalytic chemical vapor deposition apparatus
WO2017148067A1 (en) * 2016-03-01 2017-09-08 北京化工大学 Method for preparing layered non-metallic material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216201A (en) * 1975-07-29 1977-02-07 Toshiba Corp Manufacturing method of pick-up cantilever

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216201A (en) * 1975-07-29 1977-02-07 Toshiba Corp Manufacturing method of pick-up cantilever

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008300793A (en) * 2007-06-04 2008-12-11 Ulvac Japan Ltd Catalytic chemical vapor deposition apparatus
WO2017148067A1 (en) * 2016-03-01 2017-09-08 北京化工大学 Method for preparing layered non-metallic material

Also Published As

Publication number Publication date
JPS6149248B2 (en) 1986-10-28

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