JPS6128371B2 - - Google Patents

Info

Publication number
JPS6128371B2
JPS6128371B2 JP55064287A JP6428780A JPS6128371B2 JP S6128371 B2 JPS6128371 B2 JP S6128371B2 JP 55064287 A JP55064287 A JP 55064287A JP 6428780 A JP6428780 A JP 6428780A JP S6128371 B2 JPS6128371 B2 JP S6128371B2
Authority
JP
Japan
Prior art keywords
tube
reaction
gas
reaction tube
generation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55064287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56158143A (en
Inventor
Kyohiko Kotani
Junichi Mihashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6428780A priority Critical patent/JPS56158143A/ja
Priority to DE19813118848 priority patent/DE3118848C2/de
Publication of JPS56158143A publication Critical patent/JPS56158143A/ja
Publication of JPS6128371B2 publication Critical patent/JPS6128371B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP6428780A 1980-05-12 1980-05-12 Reduced pressure type vapor phase growing device Granted JPS56158143A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6428780A JPS56158143A (en) 1980-05-12 1980-05-12 Reduced pressure type vapor phase growing device
DE19813118848 DE3118848C2 (de) 1980-05-12 1981-05-12 Niederdruck-Beschichtungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6428780A JPS56158143A (en) 1980-05-12 1980-05-12 Reduced pressure type vapor phase growing device

Publications (2)

Publication Number Publication Date
JPS56158143A JPS56158143A (en) 1981-12-05
JPS6128371B2 true JPS6128371B2 (enrdf_load_stackoverflow) 1986-06-30

Family

ID=13253861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6428780A Granted JPS56158143A (en) 1980-05-12 1980-05-12 Reduced pressure type vapor phase growing device

Country Status (1)

Country Link
JP (1) JPS56158143A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6061722U (ja) * 1983-09-30 1985-04-30 株式会社島津製作所 成膜装置
JPS60192327A (ja) * 1984-03-14 1985-09-30 Toshiba Corp 半導体製造装置の洗浄方法
JPS6114726A (ja) * 1984-06-29 1986-01-22 Fujitsu Ltd 半導体基板の処理方法
JPH0693454B2 (ja) * 1985-10-03 1994-11-16 松下電器産業株式会社 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216482A (en) * 1975-07-30 1977-02-07 Toshiba Corp Surface treatment apparatus using activated gas

Also Published As

Publication number Publication date
JPS56158143A (en) 1981-12-05

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