JPS6127638A - 薄膜加工方法 - Google Patents

薄膜加工方法

Info

Publication number
JPS6127638A
JPS6127638A JP14891884A JP14891884A JPS6127638A JP S6127638 A JPS6127638 A JP S6127638A JP 14891884 A JP14891884 A JP 14891884A JP 14891884 A JP14891884 A JP 14891884A JP S6127638 A JPS6127638 A JP S6127638A
Authority
JP
Japan
Prior art keywords
thin film
substrate
patterns
thin
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14891884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544827B2 (enExample
Inventor
Masaaki Yasumoto
安本　雅昭
Tadayoshi Enomoto
榎本　忠儀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP14891884A priority Critical patent/JPS6127638A/ja
Publication of JPS6127638A publication Critical patent/JPS6127638A/ja
Publication of JPH0544827B2 publication Critical patent/JPH0544827B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P76/202—

Landscapes

  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
JP14891884A 1984-07-18 1984-07-18 薄膜加工方法 Granted JPS6127638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14891884A JPS6127638A (ja) 1984-07-18 1984-07-18 薄膜加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14891884A JPS6127638A (ja) 1984-07-18 1984-07-18 薄膜加工方法

Publications (2)

Publication Number Publication Date
JPS6127638A true JPS6127638A (ja) 1986-02-07
JPH0544827B2 JPH0544827B2 (enExample) 1993-07-07

Family

ID=15463568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14891884A Granted JPS6127638A (ja) 1984-07-18 1984-07-18 薄膜加工方法

Country Status (1)

Country Link
JP (1) JPS6127638A (enExample)

Also Published As

Publication number Publication date
JPH0544827B2 (enExample) 1993-07-07

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