JPH0544827B2 - - Google Patents

Info

Publication number
JPH0544827B2
JPH0544827B2 JP59148918A JP14891884A JPH0544827B2 JP H0544827 B2 JPH0544827 B2 JP H0544827B2 JP 59148918 A JP59148918 A JP 59148918A JP 14891884 A JP14891884 A JP 14891884A JP H0544827 B2 JPH0544827 B2 JP H0544827B2
Authority
JP
Japan
Prior art keywords
thin film
substrate
forming
pattern
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59148918A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127638A (ja
Inventor
Masaaki Yasumoto
Tadayoshi Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP14891884A priority Critical patent/JPS6127638A/ja
Publication of JPS6127638A publication Critical patent/JPS6127638A/ja
Publication of JPH0544827B2 publication Critical patent/JPH0544827B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P76/202—

Landscapes

  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
JP14891884A 1984-07-18 1984-07-18 薄膜加工方法 Granted JPS6127638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14891884A JPS6127638A (ja) 1984-07-18 1984-07-18 薄膜加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14891884A JPS6127638A (ja) 1984-07-18 1984-07-18 薄膜加工方法

Publications (2)

Publication Number Publication Date
JPS6127638A JPS6127638A (ja) 1986-02-07
JPH0544827B2 true JPH0544827B2 (enExample) 1993-07-07

Family

ID=15463568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14891884A Granted JPS6127638A (ja) 1984-07-18 1984-07-18 薄膜加工方法

Country Status (1)

Country Link
JP (1) JPS6127638A (enExample)

Also Published As

Publication number Publication date
JPS6127638A (ja) 1986-02-07

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