JPS61271880A - 超電導線路の形成方法 - Google Patents
超電導線路の形成方法Info
- Publication number
- JPS61271880A JPS61271880A JP60112259A JP11225985A JPS61271880A JP S61271880 A JPS61271880 A JP S61271880A JP 60112259 A JP60112259 A JP 60112259A JP 11225985 A JP11225985 A JP 11225985A JP S61271880 A JPS61271880 A JP S61271880A
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- superconducting
- etching
- contact hole
- superconductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 23
- 239000012212 insulator Substances 0.000 claims abstract description 52
- 238000005530 etching Methods 0.000 claims abstract description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052593 corundum Inorganic materials 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 38
- 238000001020 plasma etching Methods 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60112259A JPS61271880A (ja) | 1985-05-27 | 1985-05-27 | 超電導線路の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60112259A JPS61271880A (ja) | 1985-05-27 | 1985-05-27 | 超電導線路の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61271880A true JPS61271880A (ja) | 1986-12-02 |
| JPH0376791B2 JPH0376791B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-12-06 |
Family
ID=14582227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60112259A Granted JPS61271880A (ja) | 1985-05-27 | 1985-05-27 | 超電導線路の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61271880A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817689A (ja) * | 1981-07-24 | 1983-02-01 | Fujitsu Ltd | ジヨセフソン回路の製造方法 |
| JPS605235A (ja) * | 1983-06-23 | 1985-01-11 | 井関農機株式会社 | 穀粒供給装置 |
-
1985
- 1985-05-27 JP JP60112259A patent/JPS61271880A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817689A (ja) * | 1981-07-24 | 1983-02-01 | Fujitsu Ltd | ジヨセフソン回路の製造方法 |
| JPS605235A (ja) * | 1983-06-23 | 1985-01-11 | 井関農機株式会社 | 穀粒供給装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0376791B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-12-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |