JPH0376791B2 - - Google Patents

Info

Publication number
JPH0376791B2
JPH0376791B2 JP60112259A JP11225985A JPH0376791B2 JP H0376791 B2 JPH0376791 B2 JP H0376791B2 JP 60112259 A JP60112259 A JP 60112259A JP 11225985 A JP11225985 A JP 11225985A JP H0376791 B2 JPH0376791 B2 JP H0376791B2
Authority
JP
Japan
Prior art keywords
superconducting
insulator
contact hole
etching
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60112259A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61271880A (ja
Inventor
Shuichi Tawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60112259A priority Critical patent/JPS61271880A/ja
Publication of JPS61271880A publication Critical patent/JPS61271880A/ja
Publication of JPH0376791B2 publication Critical patent/JPH0376791B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60112259A 1985-05-27 1985-05-27 超電導線路の形成方法 Granted JPS61271880A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60112259A JPS61271880A (ja) 1985-05-27 1985-05-27 超電導線路の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60112259A JPS61271880A (ja) 1985-05-27 1985-05-27 超電導線路の形成方法

Publications (2)

Publication Number Publication Date
JPS61271880A JPS61271880A (ja) 1986-12-02
JPH0376791B2 true JPH0376791B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-06

Family

ID=14582227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60112259A Granted JPS61271880A (ja) 1985-05-27 1985-05-27 超電導線路の形成方法

Country Status (1)

Country Link
JP (1) JPS61271880A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817689A (ja) * 1981-07-24 1983-02-01 Fujitsu Ltd ジヨセフソン回路の製造方法
JPS605235A (ja) * 1983-06-23 1985-01-11 井関農機株式会社 穀粒供給装置

Also Published As

Publication number Publication date
JPS61271880A (ja) 1986-12-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term