JPS61264738A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61264738A
JPS61264738A JP10566785A JP10566785A JPS61264738A JP S61264738 A JPS61264738 A JP S61264738A JP 10566785 A JP10566785 A JP 10566785A JP 10566785 A JP10566785 A JP 10566785A JP S61264738 A JPS61264738 A JP S61264738A
Authority
JP
Japan
Prior art keywords
layer
contact hole
hole
width
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10566785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334856B2 (cs
Inventor
Michihiro Ono
小野　道博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP10566785A priority Critical patent/JPS61264738A/ja
Publication of JPS61264738A publication Critical patent/JPS61264738A/ja
Publication of JPH0334856B2 publication Critical patent/JPH0334856B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10566785A 1985-05-17 1985-05-17 半導体装置の製造方法 Granted JPS61264738A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10566785A JPS61264738A (ja) 1985-05-17 1985-05-17 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10566785A JPS61264738A (ja) 1985-05-17 1985-05-17 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61264738A true JPS61264738A (ja) 1986-11-22
JPH0334856B2 JPH0334856B2 (cs) 1991-05-24

Family

ID=14413787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10566785A Granted JPS61264738A (ja) 1985-05-17 1985-05-17 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61264738A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0799246A (ja) * 1992-12-02 1995-04-11 Hyundai Electron Ind Co Ltd 半導体装置のコンタクト及びその形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0799246A (ja) * 1992-12-02 1995-04-11 Hyundai Electron Ind Co Ltd 半導体装置のコンタクト及びその形成方法

Also Published As

Publication number Publication date
JPH0334856B2 (cs) 1991-05-24

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