JPS6126235B2 - - Google Patents
Info
- Publication number
- JPS6126235B2 JPS6126235B2 JP14259576A JP14259576A JPS6126235B2 JP S6126235 B2 JPS6126235 B2 JP S6126235B2 JP 14259576 A JP14259576 A JP 14259576A JP 14259576 A JP14259576 A JP 14259576A JP S6126235 B2 JPS6126235 B2 JP S6126235B2
- Authority
- JP
- Japan
- Prior art keywords
- active layer
- semiconductor substrate
- plating
- island
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 6
- 238000000576 coating method Methods 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 4
- 238000005498 polishing Methods 0.000 claims 1
- 230000004888 barrier function Effects 0.000 description 8
- 230000005669 field effect Effects 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005453 pelletization Methods 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
Landscapes
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14259576A JPS5367374A (en) | 1976-11-27 | 1976-11-27 | Manufacture of schottky barrier field effect transistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14259576A JPS5367374A (en) | 1976-11-27 | 1976-11-27 | Manufacture of schottky barrier field effect transistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5367374A JPS5367374A (en) | 1978-06-15 |
| JPS6126235B2 true JPS6126235B2 (https=) | 1986-06-19 |
Family
ID=15318948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14259576A Granted JPS5367374A (en) | 1976-11-27 | 1976-11-27 | Manufacture of schottky barrier field effect transistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5367374A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5612742A (en) * | 1979-07-11 | 1981-02-07 | Fujitsu Ltd | Semiconductor device |
| JPS5678267U (https=) * | 1979-11-07 | 1981-06-25 | ||
| US4403241A (en) * | 1980-08-22 | 1983-09-06 | Bell Telephone Laboratories, Incorporated | Method for etching III-V semiconductors and devices made by this method |
| JPS5749252A (en) * | 1980-09-09 | 1982-03-23 | Matsushita Electronics Corp | Manufacture of semiconductor device |
-
1976
- 1976-11-27 JP JP14259576A patent/JPS5367374A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5367374A (en) | 1978-06-15 |
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