JPS6118873B2 - - Google Patents
Info
- Publication number
- JPS6118873B2 JPS6118873B2 JP53073000A JP7300078A JPS6118873B2 JP S6118873 B2 JPS6118873 B2 JP S6118873B2 JP 53073000 A JP53073000 A JP 53073000A JP 7300078 A JP7300078 A JP 7300078A JP S6118873 B2 JPS6118873 B2 JP S6118873B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- present
- gold plating
- gold
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims 2
- 239000010931 gold Substances 0.000 description 19
- 229910052737 gold Inorganic materials 0.000 description 19
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 18
- 238000007747 plating Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- 238000001465 metallisation Methods 0.000 description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910018885 Pt—Au Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005453 pelletization Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7300078A JPS54163688A (en) | 1978-06-15 | 1978-06-15 | Preparation of semiconductor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7300078A JPS54163688A (en) | 1978-06-15 | 1978-06-15 | Preparation of semiconductor element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54163688A JPS54163688A (en) | 1979-12-26 |
| JPS6118873B2 true JPS6118873B2 (https=) | 1986-05-14 |
Family
ID=13505643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7300078A Granted JPS54163688A (en) | 1978-06-15 | 1978-06-15 | Preparation of semiconductor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54163688A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4403241A (en) * | 1980-08-22 | 1983-09-06 | Bell Telephone Laboratories, Incorporated | Method for etching III-V semiconductors and devices made by this method |
-
1978
- 1978-06-15 JP JP7300078A patent/JPS54163688A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54163688A (en) | 1979-12-26 |
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