JPS61260594A - 多色発光ｅｌ素子の製造法 - Google Patents
多色発光ｅｌ素子の製造法Info
- Publication number
- JPS61260594A JPS61260594A JP60103001A JP10300185A JPS61260594A JP S61260594 A JPS61260594 A JP S61260594A JP 60103001 A JP60103001 A JP 60103001A JP 10300185 A JP10300185 A JP 10300185A JP S61260594 A JPS61260594 A JP S61260594A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light
- multicolor
- emitting
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 29
- 238000005530 etching Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000003086 colorant Substances 0.000 claims description 7
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 238000000206 photolithography Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 2
- 239000005083 Zinc sulfide Substances 0.000 claims description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910004299 TbF3 Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910010252 TiO3 Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- LKNRQYTYDPPUOX-UHFFFAOYSA-K trifluoroterbium Chemical compound F[Tb](F)F LKNRQYTYDPPUOX-UHFFFAOYSA-K 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60103001A JPS61260594A (ja) | 1985-05-15 | 1985-05-15 | 多色発光ｅｌ素子の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60103001A JPS61260594A (ja) | 1985-05-15 | 1985-05-15 | 多色発光ｅｌ素子の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61260594A true JPS61260594A (ja) | 1986-11-18 |
| JPH0515037B2 JPH0515037B2 (enrdf_load_stackoverflow) | 1993-02-26 |
Family
ID=14342432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60103001A Granted JPS61260594A (ja) | 1985-05-15 | 1985-05-15 | 多色発光ｅｌ素子の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61260594A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6366896A (ja) * | 1986-09-09 | 1988-03-25 | 日本電信電話株式会社 | 表示装置及びその製造方法 |
| JPS646395A (en) * | 1987-06-26 | 1989-01-10 | Matsushita Electric Ind Co Ltd | Manufacture of thin film el panel |
| JPS6467895A (en) * | 1987-09-07 | 1989-03-14 | Matsushita Electric Ind Co Ltd | Color el display device |
| JPS6486477A (en) * | 1987-09-29 | 1989-03-31 | Matsushita Electric Ind Co Ltd | Color el display device |
| JPH01221892A (ja) * | 1988-02-29 | 1989-09-05 | Matsushita Electric Ind Co Ltd | 多色発光ｅｌディスプレイ装置 |
| JPH0212793A (ja) * | 1988-06-30 | 1990-01-17 | Pioneer Electron Corp | 多色化固体表示装置の製造法 |
| JPH02152192A (ja) * | 1988-12-01 | 1990-06-12 | Matsushita Electric Ind Co Ltd | 多色薄膜ｅｌ素子の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58102487A (ja) * | 1981-12-14 | 1983-06-18 | 富士通株式会社 | Ｅｌ表示装置の製造方法 |
-
1985
- 1985-05-15 JP JP60103001A patent/JPS61260594A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58102487A (ja) * | 1981-12-14 | 1983-06-18 | 富士通株式会社 | Ｅｌ表示装置の製造方法 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6366896A (ja) * | 1986-09-09 | 1988-03-25 | 日本電信電話株式会社 | 表示装置及びその製造方法 |
| JPS646395A (en) * | 1987-06-26 | 1989-01-10 | Matsushita Electric Ind Co Ltd | Manufacture of thin film el panel |
| JPS6467895A (en) * | 1987-09-07 | 1989-03-14 | Matsushita Electric Ind Co Ltd | Color el display device |
| JPS6486477A (en) * | 1987-09-29 | 1989-03-31 | Matsushita Electric Ind Co Ltd | Color el display device |
| JPH01221892A (ja) * | 1988-02-29 | 1989-09-05 | Matsushita Electric Ind Co Ltd | 多色発光ｅｌディスプレイ装置 |
| JPH0212793A (ja) * | 1988-06-30 | 1990-01-17 | Pioneer Electron Corp | 多色化固体表示装置の製造法 |
| JPH02152192A (ja) * | 1988-12-01 | 1990-06-12 | Matsushita Electric Ind Co Ltd | 多色薄膜ｅｌ素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0515037B2 (enrdf_load_stackoverflow) | 1993-02-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61260594A (ja) | 多色発光ｅｌ素子の製造法 | |
| JP2848277B2 (ja) | Ｅｌ素子の製造方法 | |
| JP3027286B2 (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPS58102487A (ja) | Ｅｌ表示装置の製造方法 | |
| JPS61203591A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPS61168895A (ja) | Ｅｌ表示素子の製造法 | |
| JPS61121290A (ja) | 薄膜ｅｌ素子の製法 | |
| JPS61151996A (ja) | 薄膜エレクトロルミネセンス素子およびその製造方法 | |
| JPH0690954B2 (ja) | エレクトロルミネツセントデイスプレイ用透明電極の形成方法 | |
| JPS63136491A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPH0371594A (ja) | 蛍光体薄膜製造方法 | |
| JPS6250958B2 (enrdf_load_stackoverflow) | ||
| JPH04363893A (ja) | Ｅｌ表示装置の製造方法 | |
| JPH0580797B2 (enrdf_load_stackoverflow) | ||
| JPH0834125B2 (ja) | 多色薄膜ｅｌ素子の製造方法 | |
| JPS60172196A (ja) | エレクトロルミネセンス素子およびその製造法 | |
| JPS61185890A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPS63294693A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPH011789A (ja) | 硫化物蛍光体膜の製造方法 | |
| JPH07118387B2 (ja) | 多色発光ｅｌディスプレイ装置 | |
| JPH0685353B2 (ja) | 薄膜ｅｌ素子の形成方法 | |
| JPS6298595A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPH08162272A (ja) | Ｅｌ素子およびその製造方法 | |
| JPS61214395A (ja) | 薄膜エレクトロルミネセンス素子の製造方法 | |
| JPH01200594A (ja) | 薄膜ｅｌ素子及びその製造方法 |