JPS646395A - Manufacture of thin film el panel - Google Patents

Manufacture of thin film el panel

Info

Publication number
JPS646395A
JPS646395A JP62159987A JP15998787A JPS646395A JP S646395 A JPS646395 A JP S646395A JP 62159987 A JP62159987 A JP 62159987A JP 15998787 A JP15998787 A JP 15998787A JP S646395 A JPS646395 A JP S646395A
Authority
JP
Japan
Prior art keywords
film
etchant
emitter layer
rmh4
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62159987A
Other languages
Japanese (ja)
Other versions
JP2605720B2 (en
Inventor
Mayumi Inoue
Yosuke Fujita
Atsushi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62159987A priority Critical patent/JP2605720B2/en
Publication of JPS646395A publication Critical patent/JPS646395A/en
Application granted granted Critical
Publication of JP2605720B2 publication Critical patent/JP2605720B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)

Abstract

PURPOSE:To prevent etching at an exposed part of an emitter layer by using etchant which contains ammonium salt shown by (RmH4-mN)OH(m=0, 1, 2, 3, 4) as a main component for etching of an Al film. CONSTITUTION:An EL emitter layer 4 provided on a board 1 consists of alkali earth sulfide and the first electrode group 3 consists of a transparent conductive film 2 and the second electrode group 5 consists of an Al film 6. And the second electrode 5 is etched by etchant which contains ammonium slat shown by (RmH4-mN)OH(m=0, 1, 2, 3, 4, R is alkyl group) as a main component. Hereby, the part of the emitter layer exposed through the pin hole of the second insulation layer is prevented from being damaged by etchant, when the Al film is etched to process into stripe shape.
JP62159987A 1987-06-26 1987-06-26 Method for manufacturing thin-film EL panel Expired - Fee Related JP2605720B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62159987A JP2605720B2 (en) 1987-06-26 1987-06-26 Method for manufacturing thin-film EL panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62159987A JP2605720B2 (en) 1987-06-26 1987-06-26 Method for manufacturing thin-film EL panel

Publications (2)

Publication Number Publication Date
JPS646395A true JPS646395A (en) 1989-01-10
JP2605720B2 JP2605720B2 (en) 1997-04-30

Family

ID=15705521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62159987A Expired - Fee Related JP2605720B2 (en) 1987-06-26 1987-06-26 Method for manufacturing thin-film EL panel

Country Status (1)

Country Link
JP (1) JP2605720B2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128589A (en) * 1974-09-04 1976-03-10 Matsushita Electric Ind Co Ltd Denbahatsukokeikotainoseizohoho
JPS5589380A (en) * 1978-12-27 1980-07-05 Dainippon Toryo Co Ltd Treatment of fluorescent substance emitting light in electric field
JPS5927497A (en) * 1982-08-04 1984-02-13 シャープ株式会社 Method of forming electrode of thin film el element
JPS61260594A (en) * 1985-05-15 1986-11-18 松下電器産業株式会社 Manufacture of multicolor emission el element

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128589A (en) * 1974-09-04 1976-03-10 Matsushita Electric Ind Co Ltd Denbahatsukokeikotainoseizohoho
JPS5589380A (en) * 1978-12-27 1980-07-05 Dainippon Toryo Co Ltd Treatment of fluorescent substance emitting light in electric field
JPS5927497A (en) * 1982-08-04 1984-02-13 シャープ株式会社 Method of forming electrode of thin film el element
JPS61260594A (en) * 1985-05-15 1986-11-18 松下電器産業株式会社 Manufacture of multicolor emission el element

Also Published As

Publication number Publication date
JP2605720B2 (en) 1997-04-30

Similar Documents

Publication Publication Date Title
EP0236123A3 (en) A semiconductor device and method for preparing the same
JPS56160740A (en) Manufacture of thin-film field type cold cathode
JPS57130490A (en) Semiconductor laser device
EP0403936A3 (en) Method for producing a conductive oxide pattern
JPS646395A (en) Manufacture of thin film el panel
JPS5440079A (en) Plasma etching method
JPS6454775A (en) Manufacture of thin film element
JPS57199223A (en) Manufacture of semiconductor device
JPS5310974A (en) Etching method of oxide film
JPS6414710A (en) Production of thin film magnetic head
JPS5396664A (en) Color selecting electrode
JPS52119246A (en) Production of electrode substrate for display elements
JPS5436185A (en) Etching method of gaas system compound semiconductor crystal
SU609144A1 (en) Method of manufacturing cathode-grid unit with autoelectronic cathode
JPS5321573A (en) Etching method
JPS5534661A (en) Manufacture of etching plate
JPS6484224A (en) Electrode forming method
JPS5546989A (en) Etching method of substrate by jet printing
JPS54109719A (en) Manufacture of face plate for image pickup tube
JPS6453466A (en) Formation of miniaturized electrode pattern
JPS5432976A (en) Hard mask for electron beam
JPS5636181A (en) Light emission semiconductor device
JPS5326590A (en) Production of gallium phosphide light emission diod e
JPS56123376A (en) Etching method
JPS6439051A (en) Pin grid array

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees