JPS6124827B2 - - Google Patents
Info
- Publication number
- JPS6124827B2 JPS6124827B2 JP52114862A JP11486277A JPS6124827B2 JP S6124827 B2 JPS6124827 B2 JP S6124827B2 JP 52114862 A JP52114862 A JP 52114862A JP 11486277 A JP11486277 A JP 11486277A JP S6124827 B2 JPS6124827 B2 JP S6124827B2
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- wiring
- integrated circuit
- resistance element
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 description 10
- 230000005669 field effect Effects 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052698 phosphorus Inorganic materials 0.000 description 6
- 239000011574 phosphorus Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11486277A JPS5448182A (en) | 1977-09-22 | 1977-09-22 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11486277A JPS5448182A (en) | 1977-09-22 | 1977-09-22 | Semiconductor integrated circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5448182A JPS5448182A (en) | 1979-04-16 |
| JPS6124827B2 true JPS6124827B2 (enrdf_load_stackoverflow) | 1986-06-12 |
Family
ID=14648551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11486277A Granted JPS5448182A (en) | 1977-09-22 | 1977-09-22 | Semiconductor integrated circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5448182A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS568864A (en) * | 1979-07-02 | 1981-01-29 | Nec Corp | Semiconductor device |
| JPS6071153U (ja) * | 1983-10-20 | 1985-05-20 | 新日本無線株式会社 | 半導体装置 |
-
1977
- 1977-09-22 JP JP11486277A patent/JPS5448182A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5448182A (en) | 1979-04-16 |