JPS61205619A - 耐熱性酸化亜鉛透明導電膜 - Google Patents
耐熱性酸化亜鉛透明導電膜Info
- Publication number
- JPS61205619A JPS61205619A JP60046782A JP4678285A JPS61205619A JP S61205619 A JPS61205619 A JP S61205619A JP 60046782 A JP60046782 A JP 60046782A JP 4678285 A JP4678285 A JP 4678285A JP S61205619 A JPS61205619 A JP S61205619A
- Authority
- JP
- Japan
- Prior art keywords
- zinc oxide
- conductive film
- transparent conductive
- oxide transparent
- group iii
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60046782A JPS61205619A (ja) | 1985-03-08 | 1985-03-08 | 耐熱性酸化亜鉛透明導電膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60046782A JPS61205619A (ja) | 1985-03-08 | 1985-03-08 | 耐熱性酸化亜鉛透明導電膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61205619A true JPS61205619A (ja) | 1986-09-11 |
JPH0372011B2 JPH0372011B2 (ko) | 1991-11-15 |
Family
ID=12756897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60046782A Granted JPS61205619A (ja) | 1985-03-08 | 1985-03-08 | 耐熱性酸化亜鉛透明導電膜 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61205619A (ko) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6433811A (en) * | 1987-04-04 | 1989-02-03 | Gunze Kk | Transparent conductive film and its manufacture |
JPH01201021A (ja) * | 1988-02-04 | 1989-08-14 | Bridgestone Corp | 熱線遮蔽材料及び熱線遮蔽ガラス |
JPH01242417A (ja) * | 1988-03-25 | 1989-09-27 | Mitsubishi Metal Corp | 透明導電性酸化亜鉛膜の製造方法 |
US5776353A (en) * | 1996-02-16 | 1998-07-07 | Advanced Minerals Corporation | Advanced composite filtration media |
US5972527A (en) * | 1992-12-15 | 1999-10-26 | Idemitsu Kosan Co., Ltd. | Transparent electrically conductive layer, electrically conductive transparent substrate and electrically conductive material |
WO2003022954A1 (en) * | 2001-09-10 | 2003-03-20 | Japan Represented By President Of Tokyo Institute Of Technology | Method for producing ultraviolet absorbing material |
WO2007108266A1 (ja) | 2006-03-17 | 2007-09-27 | Nippon Mining & Metals Co., Ltd. | 酸化亜鉛系透明導電体及び同透明導電体形成用スパッタリングターゲット |
JP2007280910A (ja) * | 2006-04-03 | 2007-10-25 | Ind Technol Res Inst | 金属ナノ粒子を含むアルミニウム添加亜鉛酸化物透明導電膜とその製造方法 |
WO2008023482A1 (fr) | 2006-08-24 | 2008-02-28 | Nippon Mining & Metals Co., Ltd. | conducteur électrique transparent à base d'oxyde de zinc, cible de pulvérisation cathodique pour former le conducteur et processus de fabrication de la cible |
JPWO2006090806A1 (ja) * | 2005-02-24 | 2008-07-24 | 積水化学工業株式会社 | ガリウム含有酸化亜鉛 |
JP2009114538A (ja) * | 2007-10-19 | 2009-05-28 | Hakusui Tech Co Ltd | 酸化亜鉛系薄膜製造用のイオンプレーティング用ターゲット |
JP2009132998A (ja) * | 2007-10-30 | 2009-06-18 | Mitsubishi Materials Corp | ZnOスパッタリングターゲットとその製造方法 |
JP2009132997A (ja) * | 2007-10-30 | 2009-06-18 | Mitsubishi Materials Corp | ZnO蒸着材とその製造方法 |
US8197908B2 (en) | 2008-03-14 | 2012-06-12 | Hestia Tec, Llc | Method for preparing electrically conducting materials |
JP2012144409A (ja) * | 2011-01-14 | 2012-08-02 | Tosoh Corp | 酸化物焼結体、それから成るターゲットおよび透明導電膜 |
US8895427B2 (en) | 2008-09-04 | 2014-11-25 | Kaneka Corporation | Substrate having a transparent electrode and method for producing the same |
JPWO2016092902A1 (ja) * | 2014-12-09 | 2017-09-21 | リンテック株式会社 | 透明導電膜及び透明導電膜の製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7867636B2 (en) * | 2006-01-11 | 2011-01-11 | Murata Manufacturing Co., Ltd. | Transparent conductive film and method for manufacturing the same |
CN101496117B (zh) * | 2006-07-28 | 2012-04-18 | 株式会社爱发科 | 透明导电膜的成膜方法 |
KR101455419B1 (ko) | 2006-10-06 | 2014-10-28 | 사까이가가꾸고오교가부시끼가이샤 | 초미립자 산화아연 및 그의 제조 방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023918A (ko) * | 1973-07-02 | 1975-03-14 | ||
JPS515360A (ja) * | 1974-07-02 | 1976-01-17 | Yoshiaki Sakai | Horiesuterukeshobanno seizoho |
-
1985
- 1985-03-08 JP JP60046782A patent/JPS61205619A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023918A (ko) * | 1973-07-02 | 1975-03-14 | ||
JPS515360A (ja) * | 1974-07-02 | 1976-01-17 | Yoshiaki Sakai | Horiesuterukeshobanno seizoho |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6433811A (en) * | 1987-04-04 | 1989-02-03 | Gunze Kk | Transparent conductive film and its manufacture |
JPH01201021A (ja) * | 1988-02-04 | 1989-08-14 | Bridgestone Corp | 熱線遮蔽材料及び熱線遮蔽ガラス |
JPH01242417A (ja) * | 1988-03-25 | 1989-09-27 | Mitsubishi Metal Corp | 透明導電性酸化亜鉛膜の製造方法 |
US5972527A (en) * | 1992-12-15 | 1999-10-26 | Idemitsu Kosan Co., Ltd. | Transparent electrically conductive layer, electrically conductive transparent substrate and electrically conductive material |
US5776353A (en) * | 1996-02-16 | 1998-07-07 | Advanced Minerals Corporation | Advanced composite filtration media |
WO2003022954A1 (en) * | 2001-09-10 | 2003-03-20 | Japan Represented By President Of Tokyo Institute Of Technology | Method for producing ultraviolet absorbing material |
JPWO2006090806A1 (ja) * | 2005-02-24 | 2008-07-24 | 積水化学工業株式会社 | ガリウム含有酸化亜鉛 |
WO2007108266A1 (ja) | 2006-03-17 | 2007-09-27 | Nippon Mining & Metals Co., Ltd. | 酸化亜鉛系透明導電体及び同透明導電体形成用スパッタリングターゲット |
JP2007280910A (ja) * | 2006-04-03 | 2007-10-25 | Ind Technol Res Inst | 金属ナノ粒子を含むアルミニウム添加亜鉛酸化物透明導電膜とその製造方法 |
WO2008023482A1 (fr) | 2006-08-24 | 2008-02-28 | Nippon Mining & Metals Co., Ltd. | conducteur électrique transparent à base d'oxyde de zinc, cible de pulvérisation cathodique pour former le conducteur et processus de fabrication de la cible |
JP2009114538A (ja) * | 2007-10-19 | 2009-05-28 | Hakusui Tech Co Ltd | 酸化亜鉛系薄膜製造用のイオンプレーティング用ターゲット |
JP2009132998A (ja) * | 2007-10-30 | 2009-06-18 | Mitsubishi Materials Corp | ZnOスパッタリングターゲットとその製造方法 |
JP2009132997A (ja) * | 2007-10-30 | 2009-06-18 | Mitsubishi Materials Corp | ZnO蒸着材とその製造方法 |
US8197908B2 (en) | 2008-03-14 | 2012-06-12 | Hestia Tec, Llc | Method for preparing electrically conducting materials |
US8895427B2 (en) | 2008-09-04 | 2014-11-25 | Kaneka Corporation | Substrate having a transparent electrode and method for producing the same |
JP2012144409A (ja) * | 2011-01-14 | 2012-08-02 | Tosoh Corp | 酸化物焼結体、それから成るターゲットおよび透明導電膜 |
JPWO2016092902A1 (ja) * | 2014-12-09 | 2017-09-21 | リンテック株式会社 | 透明導電膜及び透明導電膜の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0372011B2 (ko) | 1991-11-15 |
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