JPS6119031B2 - - Google Patents

Info

Publication number
JPS6119031B2
JPS6119031B2 JP55161716A JP16171680A JPS6119031B2 JP S6119031 B2 JPS6119031 B2 JP S6119031B2 JP 55161716 A JP55161716 A JP 55161716A JP 16171680 A JP16171680 A JP 16171680A JP S6119031 B2 JPS6119031 B2 JP S6119031B2
Authority
JP
Japan
Prior art keywords
substrate
roller
contact
fixed
rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55161716A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5785285A (en
Inventor
Hirobumi Sakai
Hiroyuki Yoshitoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55161716A priority Critical patent/JPS5785285A/ja
Publication of JPS5785285A publication Critical patent/JPS5785285A/ja
Publication of JPS6119031B2 publication Critical patent/JPS6119031B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Registering Or Overturning Sheets (AREA)
JP55161716A 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device Granted JPS5785285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55161716A JPS5785285A (en) 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55161716A JPS5785285A (en) 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device

Publications (2)

Publication Number Publication Date
JPS5785285A JPS5785285A (en) 1982-05-27
JPS6119031B2 true JPS6119031B2 (enrdf_load_stackoverflow) 1986-05-15

Family

ID=15740514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55161716A Granted JPS5785285A (en) 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device

Country Status (1)

Country Link
JP (1) JPS5785285A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133149A (ja) * 1983-01-17 1984-07-31 Matsushita Electric Ind Co Ltd プリント基板位置決め装置
JPH0427879Y2 (enrdf_load_stackoverflow) * 1986-03-20 1992-07-06
JPS6331959A (ja) * 1986-07-23 1988-02-10 Seikosha Co Ltd ワ−ク位置決め装置
JPH02276298A (ja) * 1989-04-17 1990-11-13 Nec Kyushu Ltd Ｉｃ把持機構
JP2639246B2 (ja) * 1991-08-30 1997-08-06 凸版印刷株式会社 基板位置決め装置
JP2787038B2 (ja) * 1994-06-06 1998-08-13 セイコープレシジョン株式会社 基板の位置決め把持装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426666A (en) * 1977-07-29 1979-02-28 Sanyo Electric Co Ltd Positioning method of semiconductor wafer
JPS5485679A (en) * 1977-12-20 1979-07-07 Canon Inc Wafer aligning unit

Also Published As

Publication number Publication date
JPS5785285A (en) 1982-05-27

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