JPS5785285A - Method of positioning board for carrying mask exposure device - Google Patents

Method of positioning board for carrying mask exposure device

Info

Publication number
JPS5785285A
JPS5785285A JP55161716A JP16171680A JPS5785285A JP S5785285 A JPS5785285 A JP S5785285A JP 55161716 A JP55161716 A JP 55161716A JP 16171680 A JP16171680 A JP 16171680A JP S5785285 A JPS5785285 A JP S5785285A
Authority
JP
Japan
Prior art keywords
exposure device
mask exposure
positioning board
carrying mask
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55161716A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6119031B2 (enrdf_load_stackoverflow
Inventor
Hirobumi Sakai
Hiroyuki Yoshitoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55161716A priority Critical patent/JPS5785285A/ja
Publication of JPS5785285A publication Critical patent/JPS5785285A/ja
Publication of JPS6119031B2 publication Critical patent/JPS6119031B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Registering Or Overturning Sheets (AREA)
JP55161716A 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device Granted JPS5785285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55161716A JPS5785285A (en) 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55161716A JPS5785285A (en) 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device

Publications (2)

Publication Number Publication Date
JPS5785285A true JPS5785285A (en) 1982-05-27
JPS6119031B2 JPS6119031B2 (enrdf_load_stackoverflow) 1986-05-15

Family

ID=15740514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55161716A Granted JPS5785285A (en) 1980-11-17 1980-11-17 Method of positioning board for carrying mask exposure device

Country Status (1)

Country Link
JP (1) JPS5785285A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133149A (ja) * 1983-01-17 1984-07-31 Matsushita Electric Ind Co Ltd プリント基板位置決め装置
WO1987005589A1 (en) * 1986-03-20 1987-09-24 Kabushiki Kaisha Komatsu Seisakusho Positioning device for sheet material
JPS6331959A (ja) * 1986-07-23 1988-02-10 Seikosha Co Ltd ワ−ク位置決め装置
JPH02276298A (ja) * 1989-04-17 1990-11-13 Nec Kyushu Ltd Ｉｃ把持機構
JPH0558515A (ja) * 1991-08-30 1993-03-09 Toppan Printing Co Ltd 基板位置決め装置
US5667351A (en) * 1994-06-06 1997-09-16 Seikosha Co., Ltd. Positioning and clamping device of a board

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426666A (en) * 1977-07-29 1979-02-28 Sanyo Electric Co Ltd Positioning method of semiconductor wafer
JPS5485679A (en) * 1977-12-20 1979-07-07 Canon Inc Wafer aligning unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426666A (en) * 1977-07-29 1979-02-28 Sanyo Electric Co Ltd Positioning method of semiconductor wafer
JPS5485679A (en) * 1977-12-20 1979-07-07 Canon Inc Wafer aligning unit

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133149A (ja) * 1983-01-17 1984-07-31 Matsushita Electric Ind Co Ltd プリント基板位置決め装置
WO1987005589A1 (en) * 1986-03-20 1987-09-24 Kabushiki Kaisha Komatsu Seisakusho Positioning device for sheet material
JPS62153240U (enrdf_load_stackoverflow) * 1986-03-20 1987-09-29
US4838538A (en) * 1986-03-20 1989-06-13 Kabushiki Kaisha Komatsu Seisakusho Sheet material positioning apparatus
JPS6331959A (ja) * 1986-07-23 1988-02-10 Seikosha Co Ltd ワ−ク位置決め装置
JPH02276298A (ja) * 1989-04-17 1990-11-13 Nec Kyushu Ltd Ｉｃ把持機構
JPH0558515A (ja) * 1991-08-30 1993-03-09 Toppan Printing Co Ltd 基板位置決め装置
US5667351A (en) * 1994-06-06 1997-09-16 Seikosha Co., Ltd. Positioning and clamping device of a board
CN1043716C (zh) * 1994-06-06 1999-06-16 株式会社精工舍 板的定位和夹紧装置

Also Published As

Publication number Publication date
JPS6119031B2 (enrdf_load_stackoverflow) 1986-05-15

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