JPS61187348A - 半導体装置の製造法 - Google Patents

半導体装置の製造法

Info

Publication number
JPS61187348A
JPS61187348A JP2655785A JP2655785A JPS61187348A JP S61187348 A JPS61187348 A JP S61187348A JP 2655785 A JP2655785 A JP 2655785A JP 2655785 A JP2655785 A JP 2655785A JP S61187348 A JPS61187348 A JP S61187348A
Authority
JP
Japan
Prior art keywords
etching
resist
wiring
film
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2655785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544181B2 (cg-RX-API-DMAC7.html
Inventor
Katsuyuki Machida
克之 町田
Hideo Oikawa
及川　秀男
Masatoshi Oda
政利 小田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2655785A priority Critical patent/JPS61187348A/ja
Publication of JPS61187348A publication Critical patent/JPS61187348A/ja
Publication of JPH0544181B2 publication Critical patent/JPH0544181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2655785A 1985-02-15 1985-02-15 半導体装置の製造法 Granted JPS61187348A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2655785A JPS61187348A (ja) 1985-02-15 1985-02-15 半導体装置の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2655785A JPS61187348A (ja) 1985-02-15 1985-02-15 半導体装置の製造法

Publications (2)

Publication Number Publication Date
JPS61187348A true JPS61187348A (ja) 1986-08-21
JPH0544181B2 JPH0544181B2 (cg-RX-API-DMAC7.html) 1993-07-05

Family

ID=12196832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2655785A Granted JPS61187348A (ja) 1985-02-15 1985-02-15 半導体装置の製造法

Country Status (1)

Country Link
JP (1) JPS61187348A (cg-RX-API-DMAC7.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169939A (ja) * 1982-03-31 1983-10-06 Toshiba Corp 半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169939A (ja) * 1982-03-31 1983-10-06 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0544181B2 (cg-RX-API-DMAC7.html) 1993-07-05

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Legal Events

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