JPS6117141B2 - - Google Patents

Info

Publication number
JPS6117141B2
JPS6117141B2 JP3647280A JP3647280A JPS6117141B2 JP S6117141 B2 JPS6117141 B2 JP S6117141B2 JP 3647280 A JP3647280 A JP 3647280A JP 3647280 A JP3647280 A JP 3647280A JP S6117141 B2 JPS6117141 B2 JP S6117141B2
Authority
JP
Japan
Prior art keywords
wafer
vacuum suction
probe
suction table
polishing jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3647280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56133843A (en
Inventor
Akitoshi Tetsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3647280A priority Critical patent/JPS56133843A/ja
Publication of JPS56133843A publication Critical patent/JPS56133843A/ja
Publication of JPS6117141B2 publication Critical patent/JPS6117141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3647280A 1980-03-21 1980-03-21 Probe grinder for probe card Granted JPS56133843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3647280A JPS56133843A (en) 1980-03-21 1980-03-21 Probe grinder for probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3647280A JPS56133843A (en) 1980-03-21 1980-03-21 Probe grinder for probe card

Publications (2)

Publication Number Publication Date
JPS56133843A JPS56133843A (en) 1981-10-20
JPS6117141B2 true JPS6117141B2 (zh) 1986-05-06

Family

ID=12470751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3647280A Granted JPS56133843A (en) 1980-03-21 1980-03-21 Probe grinder for probe card

Country Status (1)

Country Link
JP (1) JPS56133843A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6155338U (zh) * 1984-09-14 1986-04-14
JPS6194347U (zh) * 1984-11-26 1986-06-18
JP5381118B2 (ja) * 2009-01-21 2014-01-08 東京エレクトロン株式会社 プローブ装置

Also Published As

Publication number Publication date
JPS56133843A (en) 1981-10-20

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