JPS56133843A - Probe grinder for probe card - Google Patents
Probe grinder for probe cardInfo
- Publication number
- JPS56133843A JPS56133843A JP3647280A JP3647280A JPS56133843A JP S56133843 A JPS56133843 A JP S56133843A JP 3647280 A JP3647280 A JP 3647280A JP 3647280 A JP3647280 A JP 3647280A JP S56133843 A JPS56133843 A JP S56133843A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- grinding
- wafer
- grinding jig
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3647280A JPS56133843A (en) | 1980-03-21 | 1980-03-21 | Probe grinder for probe card |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3647280A JPS56133843A (en) | 1980-03-21 | 1980-03-21 | Probe grinder for probe card |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56133843A true JPS56133843A (en) | 1981-10-20 |
JPS6117141B2 JPS6117141B2 (ja) | 1986-05-06 |
Family
ID=12470751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3647280A Granted JPS56133843A (en) | 1980-03-21 | 1980-03-21 | Probe grinder for probe card |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56133843A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6155338U (ja) * | 1984-09-14 | 1986-04-14 | ||
JPS6194347U (ja) * | 1984-11-26 | 1986-06-18 | ||
JP2010171139A (ja) * | 2009-01-21 | 2010-08-05 | Tokyo Electron Ltd | プローブ装置 |
-
1980
- 1980-03-21 JP JP3647280A patent/JPS56133843A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6155338U (ja) * | 1984-09-14 | 1986-04-14 | ||
JPS6194347U (ja) * | 1984-11-26 | 1986-06-18 | ||
JP2010171139A (ja) * | 2009-01-21 | 2010-08-05 | Tokyo Electron Ltd | プローブ装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6117141B2 (ja) | 1986-05-06 |
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