JPS5766649A - Automatic measuring device for semiconductor wafer - Google Patents

Automatic measuring device for semiconductor wafer

Info

Publication number
JPS5766649A
JPS5766649A JP14354580A JP14354580A JPS5766649A JP S5766649 A JPS5766649 A JP S5766649A JP 14354580 A JP14354580 A JP 14354580A JP 14354580 A JP14354580 A JP 14354580A JP S5766649 A JPS5766649 A JP S5766649A
Authority
JP
Japan
Prior art keywords
belt conveyor
transferred
semiconductor wafers
semiconductor wafer
route
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14354580A
Other languages
Japanese (ja)
Other versions
JPS592182B2 (en
Inventor
Yoshie Hasegawa
Original Assignee
Yoshie Hasegawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yoshie Hasegawa filed Critical Yoshie Hasegawa
Priority to JP55143545A priority Critical patent/JPS592182B2/ja
Publication of JPS5766649A publication Critical patent/JPS5766649A/en
Publication of JPS592182B2 publication Critical patent/JPS592182B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To improve capacity, by providing a semiconductor wafer transferring means constituting a transfer route connecting between a route for sending and a route for receiving. CONSTITUTION:Semiconductor wafers are sent out via a belt conveyor 7a to a loading position 3 successively one by one. The semiconductor wafers carried out to an unloading positin 4 upon the completion of measurement are transferred to a blet conveyor 6d va a belt conveyor 7b, and are accomodated in an accomodating vessel on the elevator mechanism 2d one by one. The semiconductor wafers are then sent successively via a belt conveyor 7a to the loading position 3 one by one. And, the semiconductor wafers carried out to the unloading position 4 upon the completion of measurment are transferred to the position of a belt conveyor 8 by means of a belt conveyor 7b, and further transferred to the side of the belt conveyor 7a by means of the belt conveyor 8. Still more, they are transferred to a belt conveyor 6a, thus being accomodated in the accomodating vessel of an elevator mechanism 2a.
JP55143545A 1980-10-13 1980-10-13 Expired JPS592182B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55143545A JPS592182B2 (en) 1980-10-13 1980-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55143545A JPS592182B2 (en) 1980-10-13 1980-10-13

Publications (2)

Publication Number Publication Date
JPS5766649A true JPS5766649A (en) 1982-04-22
JPS592182B2 JPS592182B2 (en) 1984-01-17

Family

ID=15341234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55143545A Expired JPS592182B2 (en) 1980-10-13 1980-10-13

Country Status (1)

Country Link
JP (1) JPS592182B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS615543A (en) * 1984-06-19 1986-01-11 Toshiba Corp Wafer conveying device
JPS6251235A (en) * 1985-08-30 1987-03-05 Canon Inc Wafer prober
JPS62262438A (en) * 1986-05-09 1987-11-14 Canon Inc Wafer processing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01122683U (en) * 1988-02-17 1989-08-21

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448482A (en) * 1978-09-06 1979-04-17 Hitachi Ltd Sample absorbing stand and sample handler having its stand

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448482A (en) * 1978-09-06 1979-04-17 Hitachi Ltd Sample absorbing stand and sample handler having its stand

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS615543A (en) * 1984-06-19 1986-01-11 Toshiba Corp Wafer conveying device
JPH0650757B2 (en) * 1984-06-19 1994-06-29 株式会社東芝 Wafer transfer device
JPS6251235A (en) * 1985-08-30 1987-03-05 Canon Inc Wafer prober
JPH0715931B2 (en) * 1985-08-30 1995-02-22 キヤノン株式会社 Wafer processing equipment
JPS62262438A (en) * 1986-05-09 1987-11-14 Canon Inc Wafer processing device
JPH0682743B2 (en) * 1986-05-09 1994-10-19 キヤノン株式会社 Wafer processing equipment

Also Published As

Publication number Publication date
JPS592182B2 (en) 1984-01-17

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