JPS52149696A - Jigs for use in grinding silicon wafer - Google Patents

Jigs for use in grinding silicon wafer

Info

Publication number
JPS52149696A
JPS52149696A JP6740576A JP6740576A JPS52149696A JP S52149696 A JPS52149696 A JP S52149696A JP 6740576 A JP6740576 A JP 6740576A JP 6740576 A JP6740576 A JP 6740576A JP S52149696 A JPS52149696 A JP S52149696A
Authority
JP
Japan
Prior art keywords
jigs
silicon wafer
grinding silicon
grinding
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6740576A
Other languages
Japanese (ja)
Other versions
JPS6033624B2 (en
Inventor
Hajime Yamashita
Shiyunzou Shimai
Shiyunji Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP51067405A priority Critical patent/JPS6033624B2/en
Publication of JPS52149696A publication Critical patent/JPS52149696A/en
Publication of JPS6033624B2 publication Critical patent/JPS6033624B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP51067405A 1976-06-09 1976-06-09 Silicon wafer polishing jig Expired JPS6033624B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51067405A JPS6033624B2 (en) 1976-06-09 1976-06-09 Silicon wafer polishing jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51067405A JPS6033624B2 (en) 1976-06-09 1976-06-09 Silicon wafer polishing jig

Publications (2)

Publication Number Publication Date
JPS52149696A true JPS52149696A (en) 1977-12-12
JPS6033624B2 JPS6033624B2 (en) 1985-08-03

Family

ID=13343988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51067405A Expired JPS6033624B2 (en) 1976-06-09 1976-06-09 Silicon wafer polishing jig

Country Status (1)

Country Link
JP (1) JPS6033624B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062459A (en) * 1983-09-14 1985-04-10 Hitachi Ltd Ceramic lapping surface plate
JPS61203265A (en) * 1985-03-01 1986-09-09 Nippon Telegr & Teleph Corp <Ntt> Surface plate for polishing ceramic
JPS63103948U (en) * 1986-12-24 1988-07-06

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062459A (en) * 1983-09-14 1985-04-10 Hitachi Ltd Ceramic lapping surface plate
JPH059227B2 (en) * 1983-09-14 1993-02-04 Hitachi Ltd
JPS61203265A (en) * 1985-03-01 1986-09-09 Nippon Telegr & Teleph Corp <Ntt> Surface plate for polishing ceramic
JPH0242627B2 (en) * 1985-03-01 1990-09-25
JPS63103948U (en) * 1986-12-24 1988-07-06

Also Published As

Publication number Publication date
JPS6033624B2 (en) 1985-08-03

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