JPS52149696A - Jigs for use in grinding silicon wafer - Google Patents
Jigs for use in grinding silicon waferInfo
- Publication number
- JPS52149696A JPS52149696A JP6740576A JP6740576A JPS52149696A JP S52149696 A JPS52149696 A JP S52149696A JP 6740576 A JP6740576 A JP 6740576A JP 6740576 A JP6740576 A JP 6740576A JP S52149696 A JPS52149696 A JP S52149696A
- Authority
- JP
- Japan
- Prior art keywords
- jigs
- silicon wafer
- grinding silicon
- grinding
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51067405A JPS6033624B2 (en) | 1976-06-09 | 1976-06-09 | Silicon wafer polishing jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51067405A JPS6033624B2 (en) | 1976-06-09 | 1976-06-09 | Silicon wafer polishing jig |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52149696A true JPS52149696A (en) | 1977-12-12 |
JPS6033624B2 JPS6033624B2 (en) | 1985-08-03 |
Family
ID=13343988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51067405A Expired JPS6033624B2 (en) | 1976-06-09 | 1976-06-09 | Silicon wafer polishing jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6033624B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062459A (en) * | 1983-09-14 | 1985-04-10 | Hitachi Ltd | Ceramic lapping surface plate |
JPS61203265A (en) * | 1985-03-01 | 1986-09-09 | Nippon Telegr & Teleph Corp <Ntt> | Surface plate for polishing ceramic |
JPS63103948U (en) * | 1986-12-24 | 1988-07-06 |
-
1976
- 1976-06-09 JP JP51067405A patent/JPS6033624B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062459A (en) * | 1983-09-14 | 1985-04-10 | Hitachi Ltd | Ceramic lapping surface plate |
JPH059227B2 (en) * | 1983-09-14 | 1993-02-04 | Hitachi Ltd | |
JPS61203265A (en) * | 1985-03-01 | 1986-09-09 | Nippon Telegr & Teleph Corp <Ntt> | Surface plate for polishing ceramic |
JPH0242627B2 (en) * | 1985-03-01 | 1990-09-25 | ||
JPS63103948U (en) * | 1986-12-24 | 1988-07-06 |
Also Published As
Publication number | Publication date |
---|---|
JPS6033624B2 (en) | 1985-08-03 |
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