JPS5776853A - Testing method for semiconductor wafer - Google Patents
Testing method for semiconductor waferInfo
- Publication number
- JPS5776853A JPS5776853A JP15259280A JP15259280A JPS5776853A JP S5776853 A JPS5776853 A JP S5776853A JP 15259280 A JP15259280 A JP 15259280A JP 15259280 A JP15259280 A JP 15259280A JP S5776853 A JPS5776853 A JP S5776853A
- Authority
- JP
- Japan
- Prior art keywords
- chips
- sheets
- processing unit
- central processing
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/316—Testing of analog circuits
Abstract
PURPOSE:To shorten total testing time by testing all chips of wafers sampled from a lot and omitting the test of chips, relative positions thereof are the same as chips recognized as acceptables through the test. CONSTITUTION:S Sheets are sampled from N sheets, all chips of the S sheets are measured by means of a testing device 1 and test results are transmitted to a wafer prober 2 and a central processing unit 4. The central processing unit 4 reads the positional coordinates of the chips from the wafer prober 2 through a position controlling interface 3, and houses the test results in a memory strage 5. The central processing unit 4 inspects the results of said housing, and (N-S) sheets are not measured about the chips at the positions of acceptables. Accordingly, the total testing time of one lot is shortened.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15259280A JPS5776853A (en) | 1980-10-30 | 1980-10-30 | Testing method for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15259280A JPS5776853A (en) | 1980-10-30 | 1980-10-30 | Testing method for semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5776853A true JPS5776853A (en) | 1982-05-14 |
Family
ID=15543803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15259280A Pending JPS5776853A (en) | 1980-10-30 | 1980-10-30 | Testing method for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5776853A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60254626A (en) * | 1984-05-30 | 1985-12-16 | Sharp Corp | Wafer testing method |
-
1980
- 1980-10-30 JP JP15259280A patent/JPS5776853A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60254626A (en) * | 1984-05-30 | 1985-12-16 | Sharp Corp | Wafer testing method |
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