JPS5390871A - Device for chucking semiconductor wafer - Google Patents
Device for chucking semiconductor waferInfo
- Publication number
- JPS5390871A JPS5390871A JP617977A JP617977A JPS5390871A JP S5390871 A JPS5390871 A JP S5390871A JP 617977 A JP617977 A JP 617977A JP 617977 A JP617977 A JP 617977A JP S5390871 A JPS5390871 A JP S5390871A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- chucking
- chucking semiconductor
- wafer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP617977A JPS5390871A (en) | 1977-01-21 | 1977-01-21 | Device for chucking semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP617977A JPS5390871A (en) | 1977-01-21 | 1977-01-21 | Device for chucking semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5390871A true JPS5390871A (en) | 1978-08-10 |
Family
ID=11631313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP617977A Pending JPS5390871A (en) | 1977-01-21 | 1977-01-21 | Device for chucking semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5390871A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5599741A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Affixing method of article onto adhesive tape |
JPS594045A (en) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | Vacuum attracting and fixing means |
JP2014128849A (en) * | 2012-12-28 | 2014-07-10 | Taiheiyo Cement Corp | Vacuum suction device and method of manufacturing the same |
CN105645103A (en) * | 2016-01-20 | 2016-06-08 | 山东工业陶瓷研究设计院有限公司 | Slab ceramic membrane green body transfer device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50152671A (en) * | 1974-05-28 | 1975-12-08 |
-
1977
- 1977-01-21 JP JP617977A patent/JPS5390871A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50152671A (en) * | 1974-05-28 | 1975-12-08 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5599741A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Affixing method of article onto adhesive tape |
JPS594045A (en) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | Vacuum attracting and fixing means |
JPS634938B2 (en) * | 1982-06-30 | 1988-02-01 | Fujitsu Ltd | |
JP2014128849A (en) * | 2012-12-28 | 2014-07-10 | Taiheiyo Cement Corp | Vacuum suction device and method of manufacturing the same |
CN105645103A (en) * | 2016-01-20 | 2016-06-08 | 山东工业陶瓷研究设计院有限公司 | Slab ceramic membrane green body transfer device |
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