GB2007495B - Carrier for semiconductor wafers - Google Patents

Carrier for semiconductor wafers

Info

Publication number
GB2007495B
GB2007495B GB7843552A GB7843552A GB2007495B GB 2007495 B GB2007495 B GB 2007495B GB 7843552 A GB7843552 A GB 7843552A GB 7843552 A GB7843552 A GB 7843552A GB 2007495 B GB2007495 B GB 2007495B
Authority
GB
United Kingdom
Prior art keywords
carrier
semiconductor wafers
wafers
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7843552A
Other versions
GB2007495A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kasper Instruments Inc
Original Assignee
Kasper Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/915,277 external-priority patent/US4153164A/en
Application filed by Kasper Instruments Inc filed Critical Kasper Instruments Inc
Publication of GB2007495A publication Critical patent/GB2007495A/en
Application granted granted Critical
Publication of GB2007495B publication Critical patent/GB2007495B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
GB7843552A 1977-11-07 1978-11-07 Carrier for semiconductor wafers Expired GB2007495B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US84892177A 1977-11-07 1977-11-07
US05/915,277 US4153164A (en) 1978-06-13 1978-06-13 Carrier for semiconductive wafers

Publications (2)

Publication Number Publication Date
GB2007495A GB2007495A (en) 1979-05-23
GB2007495B true GB2007495B (en) 1982-05-06

Family

ID=27126810

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7843552A Expired GB2007495B (en) 1977-11-07 1978-11-07 Carrier for semiconductor wafers

Country Status (3)

Country Link
JP (1) JPS5475272A (en)
DE (1) DE2848102A1 (en)
GB (1) GB2007495B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5957158U (en) * 1982-10-08 1984-04-14 アイシン精機株式会社 Hanging shelf for storage bed
JPS5957281U (en) * 1982-10-08 1984-04-14 トヨタ自動車株式会社 Automobile rear bumper
JPS59100549A (en) * 1982-11-30 1984-06-09 Nichiden Mach Ltd Apparatus for transferring wafer
GB2144718B (en) * 1983-02-23 1987-01-21 Kulicke And Soffa Cassette for holding flat articles
JPS59145036U (en) * 1983-03-18 1984-09-28 株式会社日立製作所 wafer cassette
FR2602750B1 (en) * 1986-07-29 1988-11-10 Cepe BASKET FOR STORING AND TRANSPORTING LOW-DIMENSIONAL OBJECTS AND BASKET HANDLING TOOL
DE3634935A1 (en) * 1986-10-14 1988-04-28 Heraeus Schott Quarzschmelze VERTICAL HORDE
US4930634A (en) * 1987-09-29 1990-06-05 Fluoroware, Inc. Carrier for flat panel displays
DE10045202A1 (en) * 2000-09-13 2002-04-11 Infineon Technologies Ag Cassette for flat workpieces
CN105745185B (en) 2013-10-07 2018-11-20 圣戈本陶瓷及塑料股份有限公司 Refractory product
DE102021124887A1 (en) 2021-09-27 2023-03-30 Tdk-Micronas Gmbh MAGAZINE FOR STORAGE AND TRANSPORTATION OF PLATE-SHAPED PARTS

Also Published As

Publication number Publication date
GB2007495A (en) 1979-05-23
JPS5475272A (en) 1979-06-15
DE2848102A1 (en) 1979-05-10

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)
PCNP Patent ceased through non-payment of renewal fee