JPS61160902A - 薄膜サ−ミスタ - Google Patents

薄膜サ−ミスタ

Info

Publication number
JPS61160902A
JPS61160902A JP60001050A JP105085A JPS61160902A JP S61160902 A JPS61160902 A JP S61160902A JP 60001050 A JP60001050 A JP 60001050A JP 105085 A JP105085 A JP 105085A JP S61160902 A JPS61160902 A JP S61160902A
Authority
JP
Japan
Prior art keywords
film
thin film
temperature sensitive
sensitive resistor
insulating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60001050A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0340484B2 (enExample
Inventor
彪 長井
一志 山本
俊行 石黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60001050A priority Critical patent/JPS61160902A/ja
Publication of JPS61160902A publication Critical patent/JPS61160902A/ja
Publication of JPH0340484B2 publication Critical patent/JPH0340484B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP60001050A 1985-01-08 1985-01-08 薄膜サ−ミスタ Granted JPS61160902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60001050A JPS61160902A (ja) 1985-01-08 1985-01-08 薄膜サ−ミスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60001050A JPS61160902A (ja) 1985-01-08 1985-01-08 薄膜サ−ミスタ

Publications (2)

Publication Number Publication Date
JPS61160902A true JPS61160902A (ja) 1986-07-21
JPH0340484B2 JPH0340484B2 (enExample) 1991-06-19

Family

ID=11490720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60001050A Granted JPS61160902A (ja) 1985-01-08 1985-01-08 薄膜サ−ミスタ

Country Status (1)

Country Link
JP (1) JPS61160902A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184304A (ja) * 1986-09-26 1988-07-29 住友電気工業株式会社 サーミスタとその製造方法
JP2013538462A (ja) * 2010-09-13 2013-10-10 ピーエスティ・センサーズ・（プロプライエタリー）・リミテッド 印刷された温度センサ
WO2025211167A1 (ja) * 2024-04-05 2025-10-09 株式会社大真空 圧電振動デバイス

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184304A (ja) * 1986-09-26 1988-07-29 住友電気工業株式会社 サーミスタとその製造方法
JP2013538462A (ja) * 2010-09-13 2013-10-10 ピーエスティ・センサーズ・（プロプライエタリー）・リミテッド 印刷された温度センサ
WO2025211167A1 (ja) * 2024-04-05 2025-10-09 株式会社大真空 圧電振動デバイス

Also Published As

Publication number Publication date
JPH0340484B2 (enExample) 1991-06-19

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