JPS61138285A - 液晶表示素子 - Google Patents
液晶表示素子Info
- Publication number
- JPS61138285A JPS61138285A JP59260474A JP26047484A JPS61138285A JP S61138285 A JPS61138285 A JP S61138285A JP 59260474 A JP59260474 A JP 59260474A JP 26047484 A JP26047484 A JP 26047484A JP S61138285 A JPS61138285 A JP S61138285A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- gate
- thin film
- display
- bus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 21
- 239000010408 film Substances 0.000 claims description 38
- 239000010409 thin film Substances 0.000 claims description 34
- 239000004065 semiconductor Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- 230000000903 blocking effect Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 241000272525 Anas platyrhynchos Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- -1 ITO Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
- H10D30/6731—Top-gate only TFTs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6723—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device having light shields
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
- H10D30/6743—Silicon
- H10D30/6746—Amorphous silicon
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Cookers (AREA)
- Liquid Crystal Display Device Control (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59260474A JPS61138285A (ja) | 1984-12-10 | 1984-12-10 | 液晶表示素子 |
| US06/804,556 US4723838A (en) | 1984-12-10 | 1985-12-04 | Liquid crystal display device |
| DE85115694T DE3587470T2 (de) | 1984-12-10 | 1985-12-10 | Flüssigkristallanzeigevorrichtung. |
| EP85115694A EP0186036B1 (en) | 1984-12-10 | 1985-12-10 | Liquid crystal display device |
| AT85115694T ATE91805T1 (de) | 1984-12-10 | 1985-12-10 | Fluessigkristallanzeigevorrichtung. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59260474A JPS61138285A (ja) | 1984-12-10 | 1984-12-10 | 液晶表示素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61138285A true JPS61138285A (ja) | 1986-06-25 |
| JPH0584490B2 JPH0584490B2 (enExample) | 1993-12-02 |
Family
ID=17348447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59260474A Granted JPS61138285A (ja) | 1984-12-10 | 1984-12-10 | 液晶表示素子 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4723838A (enExample) |
| EP (1) | EP0186036B1 (enExample) |
| JP (1) | JPS61138285A (enExample) |
| AT (1) | ATE91805T1 (enExample) |
| DE (1) | DE3587470T2 (enExample) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4857907A (en) * | 1986-04-30 | 1989-08-15 | 501 Sharp Kabushiki Kaisha | Liquid-crystal display device |
| US4903094A (en) * | 1986-08-26 | 1990-02-20 | General Electric Company | Memory cell structure having radiation hardness |
| DE3808400A1 (de) * | 1987-05-14 | 1988-12-01 | Licentia Gmbh | Fluessigkristall-anzeigevorrichtung |
| US4810061A (en) * | 1987-06-24 | 1989-03-07 | Alps Electric Co., Ltd. | Liquid crystal element having conductive wiring part extending from top of transistor light shield to edge |
| JP2786628B2 (ja) * | 1987-10-15 | 1998-08-13 | シャープ株式会社 | 液晶パネルの電極構造 |
| US4960719A (en) * | 1988-02-04 | 1990-10-02 | Seikosha Co., Ltd. | Method for producing amorphous silicon thin film transistor array substrate |
| JPH01217421A (ja) * | 1988-02-26 | 1989-08-31 | Seikosha Co Ltd | 非晶質シリコン薄膜トランジスタアレイ基板およびその製造方法 |
| US5245452A (en) * | 1988-06-24 | 1993-09-14 | Matsushita Electronics Corporation | Active matric drive liquid crystal display device using polycrystalline silicon pixel electrodes |
| US5053347A (en) * | 1989-08-03 | 1991-10-01 | Industrial Technology Research Institute | Amorphous silicon thin film transistor with a depletion gate |
| US5084777A (en) * | 1989-11-14 | 1992-01-28 | Greyhawk Systems, Inc. | Light addressed liquid crystal light valve incorporating electrically insulating light blocking material of a-SiGe:H |
| WO1991007689A1 (en) * | 1989-11-14 | 1991-05-30 | Greyhawk Systems, Inc. | Improved light addressed liquid crystal light valve incorporating electrically insulating light blocking material |
| WO1991010170A1 (en) * | 1989-12-22 | 1991-07-11 | Manufacturing Sciences, Inc. | Programmable masking apparatus |
| JP2538086B2 (ja) * | 1990-01-11 | 1996-09-25 | 松下電器産業株式会社 | 液晶表示デバイスおよびその製造方法 |
| US5098860A (en) * | 1990-05-07 | 1992-03-24 | The Boeing Company | Method of fabricating high-density interconnect structures having tantalum/tantalum oxide layers |
| GB2245741A (en) * | 1990-06-27 | 1992-01-08 | Philips Electronic Associated | Active matrix liquid crystal devices |
| FR2679057B1 (fr) * | 1991-07-11 | 1995-10-20 | Morin Francois | Structure d'ecran a cristal liquide, a matrice active et a haute definition. |
| US6556257B2 (en) * | 1991-09-05 | 2003-04-29 | Sony Corporation | Liquid crystal display device |
| JPH07175084A (ja) * | 1993-12-21 | 1995-07-14 | Hitachi Ltd | 液晶表示装置及びその製造方法 |
| US5691782A (en) * | 1994-07-08 | 1997-11-25 | Sanyo Electric Co., Ltd. | Liquid-crystal display with inter-line short-circuit preventive function and process for producing same |
| US5614729A (en) * | 1994-07-08 | 1997-03-25 | Hosiden Corporation | Top gate thin-film transistor |
| US5539219A (en) * | 1995-05-19 | 1996-07-23 | Ois Optical Imaging Systems, Inc. | Thin film transistor with reduced channel length for liquid crystal displays |
| US5532180A (en) * | 1995-06-02 | 1996-07-02 | Ois Optical Imaging Systems, Inc. | Method of fabricating a TFT with reduced channel length |
| US5650358A (en) * | 1995-08-28 | 1997-07-22 | Ois Optical Imaging Systems, Inc. | Method of making a TFT having a reduced channel length |
| JP3149793B2 (ja) * | 1996-07-22 | 2001-03-26 | 日本電気株式会社 | 反射型液晶表示装置及びその製造方法 |
| JP2798066B2 (ja) | 1996-08-05 | 1998-09-17 | 日本電気株式会社 | 薄膜トランジスター、その製造方法および表示装置 |
| GB9626487D0 (en) * | 1996-12-17 | 1997-02-05 | Philips Electronics Nv | Electronic devices and their manufacture |
| JPH11174491A (ja) * | 1997-12-08 | 1999-07-02 | Nec Corp | アクティブマトリクス型液晶表示装置 |
| JP3022443B2 (ja) * | 1997-11-05 | 2000-03-21 | 日本電気株式会社 | 半導体デバイスおよびその製造方法 |
| JP3617458B2 (ja) * | 2000-02-18 | 2005-02-02 | セイコーエプソン株式会社 | 表示装置用基板、液晶装置及び電子機器 |
| GB0029315D0 (en) * | 2000-12-01 | 2001-01-17 | Koninkl Philips Electronics Nv | Method of increasing the conductivity of a transparent conductive layer |
| KR100721304B1 (ko) * | 2000-12-29 | 2007-05-25 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 액정패널 및 그의 제조방법 |
| US9176353B2 (en) * | 2007-06-29 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
| US8921858B2 (en) * | 2007-06-29 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
| US8330887B2 (en) * | 2007-07-27 | 2012-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
| CN101807583B (zh) | 2009-02-18 | 2011-07-27 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
| CN102269900B (zh) * | 2010-06-03 | 2013-04-24 | 北京京东方光电科技有限公司 | Tft阵列基板及其制造方法 |
| KR101731047B1 (ko) * | 2010-12-01 | 2017-05-12 | 삼성디스플레이 주식회사 | 적외선 감지 트랜지스터, 이를 포함하는 표시 장치의 제조 방법 |
| KR20130027188A (ko) * | 2011-09-07 | 2013-03-15 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
| KR102105485B1 (ko) * | 2012-11-23 | 2020-04-29 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 그 제조 방법 |
| KR102112844B1 (ko) * | 2013-10-15 | 2020-05-19 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조방법 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5715469A (en) * | 1980-07-02 | 1982-01-26 | Matsushita Electric Ind Co Ltd | Thin film transistor for transmission type display panel and manufacture thereof |
| JPS59501562A (ja) * | 1982-09-14 | 1984-08-30 | フランス・テレコム・エタブリスマン・オウトノム・デ・ドロワ・パブリック | 薄膜トランジスタとコンデンサとを用いた表示スクリーンの製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1789084B2 (de) * | 1961-08-17 | 1973-05-30 | Rca Corp., New York, N.Y. (V.St.A.) | Duennschicht-verknuepfungsglied und verfahren zu seiner herstellung |
| US3671820A (en) * | 1970-04-27 | 1972-06-20 | Rudolph R Haering | High voltage thin-film transistor |
| US4094582A (en) * | 1976-10-18 | 1978-06-13 | Rca Corporation | Liquid crystal matrix display device with transistors |
| JPS58170067A (ja) * | 1982-03-31 | 1983-10-06 | Fujitsu Ltd | 薄膜トランジスタの製造方法 |
| US4597001A (en) * | 1984-10-05 | 1986-06-24 | General Electric Company | Thin film field-effect transistors with tolerance to electrode misalignment |
-
1984
- 1984-12-10 JP JP59260474A patent/JPS61138285A/ja active Granted
-
1985
- 1985-12-04 US US06/804,556 patent/US4723838A/en not_active Expired - Lifetime
- 1985-12-10 AT AT85115694T patent/ATE91805T1/de not_active IP Right Cessation
- 1985-12-10 EP EP85115694A patent/EP0186036B1/en not_active Expired - Lifetime
- 1985-12-10 DE DE85115694T patent/DE3587470T2/de not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5715469A (en) * | 1980-07-02 | 1982-01-26 | Matsushita Electric Ind Co Ltd | Thin film transistor for transmission type display panel and manufacture thereof |
| JPS59501562A (ja) * | 1982-09-14 | 1984-08-30 | フランス・テレコム・エタブリスマン・オウトノム・デ・ドロワ・パブリック | 薄膜トランジスタとコンデンサとを用いた表示スクリーンの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3587470D1 (de) | 1993-08-26 |
| EP0186036A3 (en) | 1988-09-07 |
| ATE91805T1 (de) | 1993-08-15 |
| JPH0584490B2 (enExample) | 1993-12-02 |
| DE3587470T2 (de) | 1993-12-09 |
| EP0186036B1 (en) | 1993-07-21 |
| US4723838A (en) | 1988-02-09 |
| EP0186036A2 (en) | 1986-07-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |