JPS61124095A - 薄膜ｅｌ素子の製造方法 - Google Patents

薄膜ｅｌ素子の製造方法

Info

Publication number
JPS61124095A
JPS61124095A JP59246663A JP24666384A JPS61124095A JP S61124095 A JPS61124095 A JP S61124095A JP 59246663 A JP59246663 A JP 59246663A JP 24666384 A JP24666384 A JP 24666384A JP S61124095 A JPS61124095 A JP S61124095A
Authority
JP
Japan
Prior art keywords
film
insulating film
thin film
etching
ito
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59246663A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318318B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
小川　郁夫
佳弘 遠藤
川口　順
岸下　博
上出　久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59246663A priority Critical patent/JPS61124095A/ja
Publication of JPS61124095A publication Critical patent/JPS61124095A/ja
Publication of JPS6318318B2 publication Critical patent/JPS6318318B2/ja
Granted legal-status Critical Current

Links

JP59246663A 1984-11-20 1984-11-20 薄膜ｅｌ素子の製造方法 Granted JPS61124095A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59246663A JPS61124095A (ja) 1984-11-20 1984-11-20 薄膜ｅｌ素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59246663A JPS61124095A (ja) 1984-11-20 1984-11-20 薄膜ｅｌ素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61124095A true JPS61124095A (ja) 1986-06-11
JPS6318318B2 JPS6318318B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-18

Family

ID=17151761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59246663A Granted JPS61124095A (ja) 1984-11-20 1984-11-20 薄膜ｅｌ素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61124095A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018195462A (ja) * 2017-05-17 2018-12-06 学校法人東京工芸大学 有機ｅｌ素子の上部電極膜のスパッタ法による製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018195462A (ja) * 2017-05-17 2018-12-06 学校法人東京工芸大学 有機ｅｌ素子の上部電極膜のスパッタ法による製造方法

Also Published As

Publication number Publication date
JPS6318318B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-18

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