JPS61123911A - Ｉｃチップの位置合せ装置 - Google Patents

Ｉｃチップの位置合せ装置

Info

Publication number
JPS61123911A
JPS61123911A JP24569684A JP24569684A JPS61123911A JP S61123911 A JPS61123911 A JP S61123911A JP 24569684 A JP24569684 A JP 24569684A JP 24569684 A JP24569684 A JP 24569684A JP S61123911 A JPS61123911 A JP S61123911A
Authority
JP
Japan
Prior art keywords
chip
displacement angle
displacement
angle
angle theta
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24569684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049330B2 (enrdf_load_stackoverflow
Inventor
Katsuhiko Kaneda
兼田　克彦
Koichi Chiba
宏一 千葉
Masayoshi Yamaguchi
政義 山口
Mutsumi Suematsu
睦 末松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24569684A priority Critical patent/JPS61123911A/ja
Publication of JPS61123911A publication Critical patent/JPS61123911A/ja
Publication of JPH049330B2 publication Critical patent/JPH049330B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP24569684A 1984-11-20 1984-11-20 Ｉｃチップの位置合せ装置 Granted JPS61123911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24569684A JPS61123911A (ja) 1984-11-20 1984-11-20 Ｉｃチップの位置合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24569684A JPS61123911A (ja) 1984-11-20 1984-11-20 Ｉｃチップの位置合せ装置

Publications (2)

Publication Number Publication Date
JPS61123911A true JPS61123911A (ja) 1986-06-11
JPH049330B2 JPH049330B2 (enrdf_load_stackoverflow) 1992-02-19

Family

ID=17137448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24569684A Granted JPS61123911A (ja) 1984-11-20 1984-11-20 Ｉｃチップの位置合せ装置

Country Status (1)

Country Link
JP (1) JPS61123911A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63196909A (ja) * 1987-02-10 1988-08-15 Rozefu:Kk 部品の組み付け位置自動調整装置
CN110170785A (zh) * 2019-05-31 2019-08-27 广东瑞谷光网通信股份有限公司 一种ld芯片定位装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54130880A (en) * 1978-04-03 1979-10-11 Hitachi Ltd Detector for chip position on semiconductor wafer
JPS57106806A (en) * 1980-12-24 1982-07-02 Toshiba Corp Device for positioning
JPS57164310A (en) * 1981-04-03 1982-10-08 Hitachi Ltd Automatic assembling device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54130880A (en) * 1978-04-03 1979-10-11 Hitachi Ltd Detector for chip position on semiconductor wafer
JPS57106806A (en) * 1980-12-24 1982-07-02 Toshiba Corp Device for positioning
JPS57164310A (en) * 1981-04-03 1982-10-08 Hitachi Ltd Automatic assembling device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63196909A (ja) * 1987-02-10 1988-08-15 Rozefu:Kk 部品の組み付け位置自動調整装置
CN110170785A (zh) * 2019-05-31 2019-08-27 广东瑞谷光网通信股份有限公司 一种ld芯片定位装置

Also Published As

Publication number Publication date
JPH049330B2 (enrdf_load_stackoverflow) 1992-02-19

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