JPS6110993B2 - - Google Patents

Info

Publication number
JPS6110993B2
JPS6110993B2 JP52040517A JP4051777A JPS6110993B2 JP S6110993 B2 JPS6110993 B2 JP S6110993B2 JP 52040517 A JP52040517 A JP 52040517A JP 4051777 A JP4051777 A JP 4051777A JP S6110993 B2 JPS6110993 B2 JP S6110993B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
layer
hcl
pattern
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52040517A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53125776A (en
Inventor
Yasuaki Hokari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4051777A priority Critical patent/JPS53125776A/ja
Publication of JPS53125776A publication Critical patent/JPS53125776A/ja
Publication of JPS6110993B2 publication Critical patent/JPS6110993B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP4051777A 1977-04-08 1977-04-08 Manufacture for semiconductor device Granted JPS53125776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4051777A JPS53125776A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4051777A JPS53125776A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS53125776A JPS53125776A (en) 1978-11-02
JPS6110993B2 true JPS6110993B2 (enExample) 1986-04-01

Family

ID=12582699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4051777A Granted JPS53125776A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53125776A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157194U (enExample) * 1985-03-20 1986-09-29

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1224606B (it) * 1988-10-10 1990-10-04 Eniricerche Spa Sensore chimico monolitico a membrana ione selettiva di tipo chemfet eprocedimento per la sua realizzazione

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157194U (enExample) * 1985-03-20 1986-09-29

Also Published As

Publication number Publication date
JPS53125776A (en) 1978-11-02

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