IT1224606B - Sensore chimico monolitico a membrana ione selettiva di tipo chemfet eprocedimento per la sua realizzazione - Google Patents
Sensore chimico monolitico a membrana ione selettiva di tipo chemfet eprocedimento per la sua realizzazioneInfo
- Publication number
- IT1224606B IT1224606B IT8867905A IT6790588A IT1224606B IT 1224606 B IT1224606 B IT 1224606B IT 8867905 A IT8867905 A IT 8867905A IT 6790588 A IT6790588 A IT 6790588A IT 1224606 B IT1224606 B IT 1224606B
- Authority
- IT
- Italy
- Prior art keywords
- realization
- procedure
- chemical sensor
- selective ion
- ion membrane
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Pressure Sensors (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8867905A IT1224606B (it) | 1988-10-10 | 1988-10-10 | Sensore chimico monolitico a membrana ione selettiva di tipo chemfet eprocedimento per la sua realizzazione |
EP89118424A EP0363805A1 (en) | 1988-10-10 | 1989-10-04 | A monolithic chemical sensor of the chemfet type incorporating an ionselective membrane and method of making the same |
US07/417,237 US5077229A (en) | 1988-10-10 | 1989-10-05 | Monolithic chemical sensor of the chemfet type incorporating an ion-selective membrane and method of making the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8867905A IT1224606B (it) | 1988-10-10 | 1988-10-10 | Sensore chimico monolitico a membrana ione selettiva di tipo chemfet eprocedimento per la sua realizzazione |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8867905A0 IT8867905A0 (it) | 1988-10-10 |
IT1224606B true IT1224606B (it) | 1990-10-04 |
Family
ID=11306250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8867905A IT1224606B (it) | 1988-10-10 | 1988-10-10 | Sensore chimico monolitico a membrana ione selettiva di tipo chemfet eprocedimento per la sua realizzazione |
Country Status (3)
Country | Link |
---|---|
US (1) | US5077229A (it) |
EP (1) | EP0363805A1 (it) |
IT (1) | IT1224606B (it) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2666930B1 (fr) * | 1990-09-14 | 1992-12-18 | Lyon Ecole Centrale | Procede et realisation d'une surface-grille d'un capteur electrochimique integre, constitue d'un transistor a effet de champ et sensible aux especes alcalino-terreuses et capteur obtenu. |
DE19814857C2 (de) * | 1998-04-02 | 2000-09-28 | Siemens Ag | Gassensor nach dem Prinzip der Austrittsarbeitsmessung |
KR100721139B1 (ko) | 2000-02-10 | 2007-05-25 | 인터내쇼널 렉티파이어 코포레이션 | 단일면 상에 돌출 접촉부를 갖는 수직 전도성의 플립칩디바이스 |
US7053425B2 (en) * | 2003-11-12 | 2006-05-30 | General Electric Company | Gas sensor device |
US7768075B2 (en) | 2006-04-06 | 2010-08-03 | Fairchild Semiconductor Corporation | Semiconductor die packages using thin dies and metal substrates |
DE102008041960A1 (de) * | 2008-09-10 | 2010-03-11 | Robert Bosch Gmbh | Messsensor, Verfahren zum Analysieren einer unpolaren Flüssigkeit, Verfahren zum Herstellen eines Messsensors |
MY162299A (en) * | 2009-10-20 | 2017-05-31 | Mimos Berhad | Inverted isfet and method of producing thereof |
MY164424A (en) * | 2011-03-03 | 2017-12-15 | Mimos Berhad | A sensor system and a method for fabricating thereof |
WO2012168932A1 (en) * | 2011-06-06 | 2012-12-13 | Yeda Research And Development Co. Ltd | Protein detector based on molecular controlled semiconductor resistor |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4020830A (en) * | 1975-03-12 | 1977-05-03 | The University Of Utah | Selective chemical sensitive FET transducers |
JPS53125776A (en) * | 1977-04-08 | 1978-11-02 | Nec Corp | Manufacture for semiconductor device |
DE2736200A1 (de) * | 1977-08-11 | 1979-02-22 | Bbc Brown Boveri & Cie | Chemisch sensitiver feldeffekt- transistor und verfahren zur herstellung desselben |
US4644380A (en) * | 1977-12-08 | 1987-02-17 | University Of Pennsylvania | Substance-sensitive electrical structures |
JPS5825221B2 (ja) * | 1977-12-12 | 1983-05-26 | 株式会社クラレ | Fet比較電極 |
JPS5582451A (en) * | 1978-12-14 | 1980-06-21 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5626250A (en) * | 1979-08-10 | 1981-03-13 | Olympus Optical Co Ltd | Composite chemical sensor |
JPS5727067A (en) * | 1980-07-25 | 1982-02-13 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of field-effect transistor |
GB2096825A (en) * | 1981-04-09 | 1982-10-20 | Sibbald Alastair | Chemical sensitive semiconductor field effect transducer |
FR2510260A1 (fr) * | 1981-07-24 | 1983-01-28 | Suisse Fond Rech Microtech | Dispositif semiconducteur sensible aux ions |
US4411741A (en) * | 1982-01-12 | 1983-10-25 | University Of Utah | Apparatus and method for measuring the concentration of components in fluids |
JPS59102154A (ja) * | 1982-12-06 | 1984-06-13 | Olympus Optical Co Ltd | 化学的感応素子 |
DE3430941A1 (de) * | 1983-08-29 | 1985-03-14 | Hitachi, Ltd., Tokio/Tokyo | Chemisch empfindlicher feldeffekttransistor-sensor |
CA1210067A (en) * | 1983-12-08 | 1986-08-19 | Ronald D. Baxter | Isfet sensor and method of manufacture |
JPS60242354A (ja) * | 1984-05-16 | 1985-12-02 | Sharp Corp | Fet型センサ |
JPS6157847A (ja) * | 1984-08-29 | 1986-03-24 | Sharp Corp | 電界効果型湿度センサ |
JPS61181955A (ja) * | 1985-02-08 | 1986-08-14 | Seitai Kinou Riyou Kagakuhin Shinseizou Gijutsu Kenkyu Kumiai | 電界効果型トランジスタイオンセンサ |
DE3513168A1 (de) * | 1985-04-12 | 1986-10-16 | Thomas 8000 München Dandekar | Biosensor bestehend aus einem halbleiter auf silizium oder kohlenstoffbasis (elektronischer teil) und nukleinbasen (od. anderen biol. monomeren) |
EP0214805B1 (en) * | 1985-08-29 | 1993-05-26 | Matsushita Electric Industrial Co., Ltd. | Sensor using a field effect transistor and method of fabricating the same |
GB8522207D0 (en) * | 1985-09-06 | 1985-10-09 | Kodak Ltd | Ion-sensitive electrochemical sensor |
US4637861A (en) * | 1985-12-16 | 1987-01-20 | Allied Corporation | Stabilized, lipid membrane-based device and method of analysis |
US4883767A (en) * | 1986-12-05 | 1989-11-28 | General Electric Company | Method of fabricating self aligned semiconductor devices |
EP0339613A3 (en) * | 1988-04-28 | 1990-11-07 | Hitachi, Ltd. | Ion selective electrode |
US4874499A (en) * | 1988-05-23 | 1989-10-17 | Massachusetts Institute Of Technology | Electrochemical microsensors and method of making such sensors |
JPH0232250A (ja) * | 1988-07-22 | 1990-02-02 | Tokyo Electric Power Co Inc:The | 管体検査装置 |
JP2646698B2 (ja) * | 1988-09-13 | 1997-08-27 | 三菱化学株式会社 | 画像形成材料及び画像形成方法 |
-
1988
- 1988-10-10 IT IT8867905A patent/IT1224606B/it active
-
1989
- 1989-10-04 EP EP89118424A patent/EP0363805A1/en not_active Withdrawn
- 1989-10-05 US US07/417,237 patent/US5077229A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0363805A1 (en) | 1990-04-18 |
IT8867905A0 (it) | 1988-10-10 |
US5077229A (en) | 1991-12-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19971014 |