JPS61104960U - - Google Patents

Info

Publication number
JPS61104960U
JPS61104960U JP18993584U JP18993584U JPS61104960U JP S61104960 U JPS61104960 U JP S61104960U JP 18993584 U JP18993584 U JP 18993584U JP 18993584 U JP18993584 U JP 18993584U JP S61104960 U JPS61104960 U JP S61104960U
Authority
JP
Japan
Prior art keywords
objective lens
potential
magnetic pole
sample
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18993584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319166Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18993584U priority Critical patent/JPH0319166Y2/ja
Publication of JPS61104960U publication Critical patent/JPS61104960U/ja
Application granted granted Critical
Publication of JPH0319166Y2 publication Critical patent/JPH0319166Y2/ja
Expired legal-status Critical Current

Links

JP18993584U 1984-12-14 1984-12-14 Expired JPH0319166Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18993584U JPH0319166Y2 (ko) 1984-12-14 1984-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18993584U JPH0319166Y2 (ko) 1984-12-14 1984-12-14

Publications (2)

Publication Number Publication Date
JPS61104960U true JPS61104960U (ko) 1986-07-03
JPH0319166Y2 JPH0319166Y2 (ko) 1991-04-23

Family

ID=30747383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18993584U Expired JPH0319166Y2 (ko) 1984-12-14 1984-12-14

Country Status (1)

Country Link
JP (1) JPH0319166Y2 (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006093161A (ja) * 1995-10-19 2006-04-06 Hitachi Ltd 走査形電子顕微鏡
JP2007005327A (ja) * 1995-10-19 2007-01-11 Hitachi Ltd 走査形電子顕微鏡
JP2007250560A (ja) * 1995-10-19 2007-09-27 Hitachi Ltd 走査形電子顕微鏡

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006093161A (ja) * 1995-10-19 2006-04-06 Hitachi Ltd 走査形電子顕微鏡
JP2007005327A (ja) * 1995-10-19 2007-01-11 Hitachi Ltd 走査形電子顕微鏡
JP2007250560A (ja) * 1995-10-19 2007-09-27 Hitachi Ltd 走査形電子顕微鏡

Also Published As

Publication number Publication date
JPH0319166Y2 (ko) 1991-04-23

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