JPS6339853U - - Google Patents
Info
- Publication number
- JPS6339853U JPS6339853U JP13307086U JP13307086U JPS6339853U JP S6339853 U JPS6339853 U JP S6339853U JP 13307086 U JP13307086 U JP 13307086U JP 13307086 U JP13307086 U JP 13307086U JP S6339853 U JPS6339853 U JP S6339853U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- exb
- mass separator
- species
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 238000000605 extraction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986133070U JPH0539555Y2 (ko) | 1986-08-29 | 1986-08-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986133070U JPH0539555Y2 (ko) | 1986-08-29 | 1986-08-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6339853U true JPS6339853U (ko) | 1988-03-15 |
JPH0539555Y2 JPH0539555Y2 (ko) | 1993-10-07 |
Family
ID=31033047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986133070U Expired - Lifetime JPH0539555Y2 (ko) | 1986-08-29 | 1986-08-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0539555Y2 (ko) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61220263A (ja) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | イオンマイクロビ−ム装置 |
JPS62103949A (ja) * | 1985-10-30 | 1987-05-14 | Jeol Ltd | 集束イオンビ−ム装置 |
-
1986
- 1986-08-29 JP JP1986133070U patent/JPH0539555Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61220263A (ja) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | イオンマイクロビ−ム装置 |
JPS62103949A (ja) * | 1985-10-30 | 1987-05-14 | Jeol Ltd | 集束イオンビ−ム装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0539555Y2 (ko) | 1993-10-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB1145107A (en) | Ion beam microanalyser | |
JPS58110956U (ja) | 荷電粒子照射装置 | |
GB1078823A (en) | Improvements in ion microscopes | |
JPS6339853U (ko) | ||
JPH0319166Y2 (ko) | ||
JP2817277B2 (ja) | X線銃 | |
JPH0254156U (ko) | ||
JPS62112844U (ko) | ||
JPS61114453A (ja) | 荷電粒子線装置 | |
JPS61220263A (ja) | イオンマイクロビ−ム装置 | |
JPS6419664A (en) | Ion beam device | |
JP2550033B2 (ja) | 荷電粒子引き込み機構 | |
JPS61118953A (ja) | 二次イオン質量分析計 | |
JPS6271865U (ko) | ||
JPH0429439Y2 (ko) | ||
SU1711260A1 (ru) | Вторично-ионный масс-спектрометр | |
JPS6158941B2 (ko) | ||
JPH0646552B2 (ja) | イオン源装置 | |
JP2569517B2 (ja) | イオンマイクロアナライザ | |
JPS6382364U (ko) | ||
JPH0181858U (ko) | ||
JPS634052U (ko) | ||
JPH0250952U (ko) | ||
JPH03116652U (ko) | ||
JPS59201357A (ja) | 二次イオン質量分析計 |