JPS5730252A - Signal detector in electron microscope - Google Patents

Signal detector in electron microscope

Info

Publication number
JPS5730252A
JPS5730252A JP10551580A JP10551580A JPS5730252A JP S5730252 A JPS5730252 A JP S5730252A JP 10551580 A JP10551580 A JP 10551580A JP 10551580 A JP10551580 A JP 10551580A JP S5730252 A JPS5730252 A JP S5730252A
Authority
JP
Japan
Prior art keywords
specimen
ring electrode
collimator
volt
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10551580A
Other languages
Japanese (ja)
Other versions
JPS6314813B2 (en
Inventor
Yoshinori Aoki
Katsuyoshi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP10551580A priority Critical patent/JPS5730252A/en
Publication of JPS5730252A publication Critical patent/JPS5730252A/en
Publication of JPS6314813B2 publication Critical patent/JPS6314813B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To improve the detection efficiency of the secondary electron produced from a specimen and to reduce the noise, by providing a ring electrode between the specimen and X-ray collimator then applying proper potential between the ring electrode and the collimator. CONSTITUTION:A collimator member 6 is electrically insulated from the circumference of an upper pole chip 1 then the voltage of approximately scores of volt is applied by a variable power source 13 while minus scores of volt is applied from a variable power source 15 onto a ring electrode 14 provided below said member 6. An electrostatic lens field is formed above a specimen holder 5 provided with the ground potential to apply the focusing function onto the secondary electron produced from the specimen.
JP10551580A 1980-07-31 1980-07-31 Signal detector in electron microscope Granted JPS5730252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10551580A JPS5730252A (en) 1980-07-31 1980-07-31 Signal detector in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10551580A JPS5730252A (en) 1980-07-31 1980-07-31 Signal detector in electron microscope

Publications (2)

Publication Number Publication Date
JPS5730252A true JPS5730252A (en) 1982-02-18
JPS6314813B2 JPS6314813B2 (en) 1988-04-01

Family

ID=14409730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10551580A Granted JPS5730252A (en) 1980-07-31 1980-07-31 Signal detector in electron microscope

Country Status (1)

Country Link
JP (1) JPS5730252A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037163U (en) * 1983-08-22 1985-03-14 日本電子株式会社 scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037163U (en) * 1983-08-22 1985-03-14 日本電子株式会社 scanning electron microscope

Also Published As

Publication number Publication date
JPS6314813B2 (en) 1988-04-01

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