JPS5750758A - Scan type electron microscope - Google Patents

Scan type electron microscope

Info

Publication number
JPS5750758A
JPS5750758A JP12630380A JP12630380A JPS5750758A JP S5750758 A JPS5750758 A JP S5750758A JP 12630380 A JP12630380 A JP 12630380A JP 12630380 A JP12630380 A JP 12630380A JP S5750758 A JPS5750758 A JP S5750758A
Authority
JP
Japan
Prior art keywords
subject
secondary electron
locus
electron microscope
potential range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12630380A
Other languages
Japanese (ja)
Inventor
Yoshiaki Goto
Toshihiro Ishizuka
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12630380A priority Critical patent/JPS5750758A/en
Publication of JPS5750758A publication Critical patent/JPS5750758A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To obtain the voltage contrast even if the potential range of the subject will vary in any way, by deflecting the locus of the secondary electron emitted from the subject by means of a pair of electrostatic electrodes provided above and below said locus. CONSTITUTION:The secondary electron beams 6, 7 emitted from a subject upon irradiation of the electron beam 1 will fly toward a secondary electron detector 5. A pair of electrostatic electrodes 8 are provided in the proximity of the locus of the secondary electron beams 6, 7 then the constant voltage corresponding with the potential range of the subject 2 is applied on said electrode 8 to deflect the flying direction of the beams 6, 7. Consequently even if the potential range of the subject 2 is varied in any way, its voltage contrast can be obtained.
JP12630380A 1980-09-11 1980-09-11 Scan type electron microscope Pending JPS5750758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12630380A JPS5750758A (en) 1980-09-11 1980-09-11 Scan type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12630380A JPS5750758A (en) 1980-09-11 1980-09-11 Scan type electron microscope

Publications (1)

Publication Number Publication Date
JPS5750758A true JPS5750758A (en) 1982-03-25

Family

ID=14931855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12630380A Pending JPS5750758A (en) 1980-09-11 1980-09-11 Scan type electron microscope

Country Status (1)

Country Link
JP (1) JPS5750758A (en)

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