JPS61101954U - - Google Patents

Info

Publication number
JPS61101954U
JPS61101954U JP18763784U JP18763784U JPS61101954U JP S61101954 U JPS61101954 U JP S61101954U JP 18763784 U JP18763784 U JP 18763784U JP 18763784 U JP18763784 U JP 18763784U JP S61101954 U JPS61101954 U JP S61101954U
Authority
JP
Japan
Prior art keywords
electron beam
sample
switching
detector
display means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18763784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18763784U priority Critical patent/JPS61101954U/ja
Publication of JPS61101954U publication Critical patent/JPS61101954U/ja
Pending legal-status Critical Current

Links

JP18763784U 1984-12-11 1984-12-11 Pending JPS61101954U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18763784U JPS61101954U (enExample) 1984-12-11 1984-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18763784U JPS61101954U (enExample) 1984-12-11 1984-12-11

Publications (1)

Publication Number Publication Date
JPS61101954U true JPS61101954U (enExample) 1986-06-28

Family

ID=30745099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18763784U Pending JPS61101954U (enExample) 1984-12-11 1984-12-11

Country Status (1)

Country Link
JP (1) JPS61101954U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040217A (ja) * 2009-08-07 2011-02-24 Hitachi Ltd 透過型電子顕微鏡およびそれを用いた試料像の観察方法
JP2019053927A (ja) * 2017-09-15 2019-04-04 日本電子株式会社 測定方法および電子顕微鏡

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229163A (en) * 1975-09-01 1977-03-04 Akashi Seisakusho Co Ltd Observing device of stereographic picture of transmitting type electro n microscope
JPS5339848A (en) * 1976-09-23 1978-04-12 Siemens Ag Method of indicating diffractive picture in transmission scanning particle beam microscope
JPS5394865A (en) * 1977-01-31 1978-08-19 Jeol Ltd Solid scanning electronic microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229163A (en) * 1975-09-01 1977-03-04 Akashi Seisakusho Co Ltd Observing device of stereographic picture of transmitting type electro n microscope
JPS5339848A (en) * 1976-09-23 1978-04-12 Siemens Ag Method of indicating diffractive picture in transmission scanning particle beam microscope
JPS5394865A (en) * 1977-01-31 1978-08-19 Jeol Ltd Solid scanning electronic microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040217A (ja) * 2009-08-07 2011-02-24 Hitachi Ltd 透過型電子顕微鏡およびそれを用いた試料像の観察方法
JP2019053927A (ja) * 2017-09-15 2019-04-04 日本電子株式会社 測定方法および電子顕微鏡

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