JPS5339848A - Method of indicating diffractive picture in transmission scanning particle beam microscope - Google Patents

Method of indicating diffractive picture in transmission scanning particle beam microscope

Info

Publication number
JPS5339848A
JPS5339848A JP11450877A JP11450877A JPS5339848A JP S5339848 A JPS5339848 A JP S5339848A JP 11450877 A JP11450877 A JP 11450877A JP 11450877 A JP11450877 A JP 11450877A JP S5339848 A JPS5339848 A JP S5339848A
Authority
JP
Japan
Prior art keywords
indicating
particle beam
beam microscope
transmission scanning
scanning particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11450877A
Other languages
Japanese (ja)
Inventor
Miyuraa Kaaruhaintsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5339848A publication Critical patent/JPS5339848A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP11450877A 1976-09-23 1977-09-22 Method of indicating diffractive picture in transmission scanning particle beam microscope Pending JPS5339848A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762643199 DE2643199B2 (en) 1976-09-23 1976-09-23 Method for the pictorial representation of a diffraction image in a transmission scanning particle beam microscope

Publications (1)

Publication Number Publication Date
JPS5339848A true JPS5339848A (en) 1978-04-12

Family

ID=5988814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11450877A Pending JPS5339848A (en) 1976-09-23 1977-09-22 Method of indicating diffractive picture in transmission scanning particle beam microscope

Country Status (4)

Country Link
JP (1) JPS5339848A (en)
DE (1) DE2643199B2 (en)
FR (1) FR2365879A1 (en)
NL (1) NL7709847A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613428A (en) * 1979-07-09 1981-02-09 Daido Steel Co Ltd Burning method in direct flame nonoxidizing heating furnace
JPS5633423A (en) * 1979-08-25 1981-04-03 Toyo Rokougiyou Kk Combustion apparatus for atmosphere of continuous nonoxidation heat treating furnace
JPS6014739A (en) * 1983-07-06 1985-01-25 Jeol Ltd Electron beam diffraction apparatus
JPS6080655U (en) * 1983-11-08 1985-06-04 日本電子株式会社 Electron microscope shutter device
JPS60105150A (en) * 1983-11-11 1985-06-10 Jeol Ltd Electron microscope
JPS61101954U (en) * 1984-12-11 1986-06-28
JPH04276013A (en) * 1991-03-04 1992-10-01 Nkk Corp Method for operating batch type heating furnace
JPH06212248A (en) * 1993-01-14 1994-08-02 Sumitomo Metal Ind Ltd Method for controlling combustion in steel heating furnace

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4799900A (en) * 1987-10-15 1989-01-24 Amp Incorporated Push on right angle connector
EP3125272A1 (en) * 2015-07-29 2017-02-01 FEI Company Scan pattern in a charged particle microscope comprising nested orbital windings

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613428A (en) * 1979-07-09 1981-02-09 Daido Steel Co Ltd Burning method in direct flame nonoxidizing heating furnace
JPS6149368B2 (en) * 1979-07-09 1986-10-29 Daido Steel Co Ltd
JPS5633423A (en) * 1979-08-25 1981-04-03 Toyo Rokougiyou Kk Combustion apparatus for atmosphere of continuous nonoxidation heat treating furnace
JPS5715176B2 (en) * 1979-08-25 1982-03-29
JPS6014739A (en) * 1983-07-06 1985-01-25 Jeol Ltd Electron beam diffraction apparatus
JPS6080655U (en) * 1983-11-08 1985-06-04 日本電子株式会社 Electron microscope shutter device
JPH0338757Y2 (en) * 1983-11-08 1991-08-15
JPS60105150A (en) * 1983-11-11 1985-06-10 Jeol Ltd Electron microscope
JPS61101954U (en) * 1984-12-11 1986-06-28
JPH04276013A (en) * 1991-03-04 1992-10-01 Nkk Corp Method for operating batch type heating furnace
JPH06212248A (en) * 1993-01-14 1994-08-02 Sumitomo Metal Ind Ltd Method for controlling combustion in steel heating furnace

Also Published As

Publication number Publication date
NL7709847A (en) 1978-03-29
DE2643199B2 (en) 1978-07-13
DE2643199A1 (en) 1978-03-30
FR2365879A1 (en) 1978-04-21

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