JPS5331955A - Transmission scanning particle beam microscope - Google Patents

Transmission scanning particle beam microscope

Info

Publication number
JPS5331955A
JPS5331955A JP10351677A JP10351677A JPS5331955A JP S5331955 A JPS5331955 A JP S5331955A JP 10351677 A JP10351677 A JP 10351677A JP 10351677 A JP10351677 A JP 10351677A JP S5331955 A JPS5331955 A JP S5331955A
Authority
JP
Japan
Prior art keywords
particle beam
beam microscope
transmission scanning
scanning particle
transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10351677A
Other languages
Japanese (ja)
Inventor
Miyuraa Karuruhaintsu
Kurishiyu Burukuharuto
Rintofuraishiyu Fuorukaa
Efu Eru Noiendorufu Hansu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5331955A publication Critical patent/JPS5331955A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP10351677A 1976-09-03 1977-08-29 Transmission scanning particle beam microscope Pending JPS5331955A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762640260 DE2640260C3 (en) 1976-09-03 1976-09-03 Transmission scanning particle beam microscope

Publications (1)

Publication Number Publication Date
JPS5331955A true JPS5331955A (en) 1978-03-25

Family

ID=5987354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10351677A Pending JPS5331955A (en) 1976-09-03 1977-08-29 Transmission scanning particle beam microscope

Country Status (5)

Country Link
JP (1) JPS5331955A (en)
DE (1) DE2640260C3 (en)
FR (1) FR2363883A1 (en)
GB (1) GB1588234A (en)
NL (1) NL7709151A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06213832A (en) * 1993-01-18 1994-08-05 Shimadzu Corp Detecting apparatus of diffracted electron
JP2005203106A (en) * 2004-01-13 2005-07-28 Jeol Ltd Transmission electron microscope
WO2019193624A1 (en) * 2018-04-02 2019-10-10 株式会社日立ハイテクノロジーズ Electron microscope

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160739A (en) * 1984-06-23 1985-12-24 Mclennan Marine Limited Night vision systems
JPS6196643A (en) * 1984-10-18 1986-05-15 Fuji Photo Film Co Ltd Transmission electron microscope
JPH071688B2 (en) * 1991-02-15 1995-01-11 株式会社島津製作所 Scanning reflection electron diffraction microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06213832A (en) * 1993-01-18 1994-08-05 Shimadzu Corp Detecting apparatus of diffracted electron
JP2005203106A (en) * 2004-01-13 2005-07-28 Jeol Ltd Transmission electron microscope
WO2019193624A1 (en) * 2018-04-02 2019-10-10 株式会社日立ハイテクノロジーズ Electron microscope
JPWO2019193624A1 (en) * 2018-04-02 2021-03-18 株式会社日立ハイテク electronic microscope

Also Published As

Publication number Publication date
FR2363883B1 (en) 1980-04-04
DE2640260B2 (en) 1978-06-22
FR2363883A1 (en) 1978-03-31
DE2640260A1 (en) 1978-03-09
NL7709151A (en) 1978-03-07
DE2640260C3 (en) 1979-03-01
GB1588234A (en) 1981-04-15

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