JPS61101686A - 真空排気装置 - Google Patents

真空排気装置

Info

Publication number
JPS61101686A
JPS61101686A JP59222125A JP22212584A JPS61101686A JP S61101686 A JPS61101686 A JP S61101686A JP 59222125 A JP59222125 A JP 59222125A JP 22212584 A JP22212584 A JP 22212584A JP S61101686 A JPS61101686 A JP S61101686A
Authority
JP
Japan
Prior art keywords
vacuum
leak
exhaust
pressure
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59222125A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580591B2 (enrdf_load_stackoverflow
Inventor
Naotake Saito
斉藤　尚武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59222125A priority Critical patent/JPS61101686A/ja
Publication of JPS61101686A publication Critical patent/JPS61101686A/ja
Publication of JPH0580591B2 publication Critical patent/JPH0580591B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP59222125A 1984-10-24 1984-10-24 真空排気装置 Granted JPS61101686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59222125A JPS61101686A (ja) 1984-10-24 1984-10-24 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59222125A JPS61101686A (ja) 1984-10-24 1984-10-24 真空排気装置

Publications (2)

Publication Number Publication Date
JPS61101686A true JPS61101686A (ja) 1986-05-20
JPH0580591B2 JPH0580591B2 (enrdf_load_stackoverflow) 1993-11-09

Family

ID=16777551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59222125A Granted JPS61101686A (ja) 1984-10-24 1984-10-24 真空排気装置

Country Status (1)

Country Link
JP (1) JPS61101686A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007048588A (ja) * 2005-08-10 2007-02-22 Jeol Ltd ガス流量設定方法およびイオンビーム加工装置
CN110509906A (zh) * 2019-09-19 2019-11-29 深圳市特尔佳科技股份有限公司 一种井下作业车用液力缓速器的控制系统
WO2021070338A1 (ja) * 2019-10-10 2021-04-15 株式会社日立ハイテク 荷電粒子線装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941855U (ja) * 1982-09-01 1984-03-17 日本電子株式会社 電子顕微鏡等の鏡筒リ−ク装置
JPS59115553U (ja) * 1983-01-26 1984-08-04 日本電子株式会社 真空装置におけるガス導入装置
JPS60167192U (ja) * 1984-04-17 1985-11-06 日本電子株式会社 タ−ボ分子ポンプを用いた排気系

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941855U (ja) * 1982-09-01 1984-03-17 日本電子株式会社 電子顕微鏡等の鏡筒リ−ク装置
JPS59115553U (ja) * 1983-01-26 1984-08-04 日本電子株式会社 真空装置におけるガス導入装置
JPS60167192U (ja) * 1984-04-17 1985-11-06 日本電子株式会社 タ−ボ分子ポンプを用いた排気系

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007048588A (ja) * 2005-08-10 2007-02-22 Jeol Ltd ガス流量設定方法およびイオンビーム加工装置
CN110509906A (zh) * 2019-09-19 2019-11-29 深圳市特尔佳科技股份有限公司 一种井下作业车用液力缓速器的控制系统
CN110509906B (zh) * 2019-09-19 2024-04-02 深圳市大为创新科技股份有限公司 一种井下作业车用液力缓速器的控制系统
WO2021070338A1 (ja) * 2019-10-10 2021-04-15 株式会社日立ハイテク 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0580591B2 (enrdf_load_stackoverflow) 1993-11-09

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Legal Events

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