JPS6342459Y2 - - Google Patents

Info

Publication number
JPS6342459Y2
JPS6342459Y2 JP13293082U JP13293082U JPS6342459Y2 JP S6342459 Y2 JPS6342459 Y2 JP S6342459Y2 JP 13293082 U JP13293082 U JP 13293082U JP 13293082 U JP13293082 U JP 13293082U JP S6342459 Y2 JPS6342459 Y2 JP S6342459Y2
Authority
JP
Japan
Prior art keywords
vacuum
vacuum chamber
leak
leak valve
column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13293082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5941855U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13293082U priority Critical patent/JPS5941855U/ja
Publication of JPS5941855U publication Critical patent/JPS5941855U/ja
Application granted granted Critical
Publication of JPS6342459Y2 publication Critical patent/JPS6342459Y2/ja
Granted legal-status Critical Current

Links

JP13293082U 1982-09-01 1982-09-01 電子顕微鏡等の鏡筒リ−ク装置 Granted JPS5941855U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13293082U JPS5941855U (ja) 1982-09-01 1982-09-01 電子顕微鏡等の鏡筒リ−ク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13293082U JPS5941855U (ja) 1982-09-01 1982-09-01 電子顕微鏡等の鏡筒リ−ク装置

Publications (2)

Publication Number Publication Date
JPS5941855U JPS5941855U (ja) 1984-03-17
JPS6342459Y2 true JPS6342459Y2 (enrdf_load_stackoverflow) 1988-11-07

Family

ID=30300030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13293082U Granted JPS5941855U (ja) 1982-09-01 1982-09-01 電子顕微鏡等の鏡筒リ−ク装置

Country Status (1)

Country Link
JP (1) JPS5941855U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101686A (ja) * 1984-10-24 1986-05-20 Hitachi Ltd 真空排気装置

Also Published As

Publication number Publication date
JPS5941855U (ja) 1984-03-17

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