JPS6091652A - 基板搬送装置 - Google Patents
基板搬送装置Info
- Publication number
- JPS6091652A JPS6091652A JP19837583A JP19837583A JPS6091652A JP S6091652 A JPS6091652 A JP S6091652A JP 19837583 A JP19837583 A JP 19837583A JP 19837583 A JP19837583 A JP 19837583A JP S6091652 A JPS6091652 A JP S6091652A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- members
- holder
- lift
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 abstract description 4
- 239000000428 dust Substances 0.000 abstract description 3
- 244000182067 Fraxinus ornus Species 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 238000005192 partition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 101150013440 DI19-1 gene Proteins 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 210000000115 thoracic cavity Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Special Conveying (AREA)
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19837583A JPS6091652A (ja) | 1983-10-25 | 1983-10-25 | 基板搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19837583A JPS6091652A (ja) | 1983-10-25 | 1983-10-25 | 基板搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6091652A true JPS6091652A (ja) | 1985-05-23 |
| JPS6335102B2 JPS6335102B2 (enrdf_load_stackoverflow) | 1988-07-13 |
Family
ID=16390063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19837583A Granted JPS6091652A (ja) | 1983-10-25 | 1983-10-25 | 基板搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6091652A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH033006A (ja) * | 1989-05-31 | 1991-01-09 | Rika Kogyo Kk | 調節計 |
| MD1075C2 (ro) * | 1992-12-28 | 1999-05-31 | Yoshiki Industrial Co., Ltd | Dispozitiv cu părghie (variante) |
-
1983
- 1983-10-25 JP JP19837583A patent/JPS6091652A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6335102B2 (enrdf_load_stackoverflow) | 1988-07-13 |
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