JPS6257377B2 - - Google Patents

Info

Publication number
JPS6257377B2
JPS6257377B2 JP7627084A JP7627084A JPS6257377B2 JP S6257377 B2 JPS6257377 B2 JP S6257377B2 JP 7627084 A JP7627084 A JP 7627084A JP 7627084 A JP7627084 A JP 7627084A JP S6257377 B2 JPS6257377 B2 JP S6257377B2
Authority
JP
Japan
Prior art keywords
vacuum
load lock
lock chamber
support plate
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7627084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60238133A (ja
Inventor
Kyoji Kinokiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP7627084A priority Critical patent/JPS60238133A/ja
Publication of JPS60238133A publication Critical patent/JPS60238133A/ja
Publication of JPS6257377B2 publication Critical patent/JPS6257377B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP7627084A 1984-04-16 1984-04-16 真空処理装置 Granted JPS60238133A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7627084A JPS60238133A (ja) 1984-04-16 1984-04-16 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7627084A JPS60238133A (ja) 1984-04-16 1984-04-16 真空処理装置

Publications (2)

Publication Number Publication Date
JPS60238133A JPS60238133A (ja) 1985-11-27
JPS6257377B2 true JPS6257377B2 (enrdf_load_stackoverflow) 1987-12-01

Family

ID=13600541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7627084A Granted JPS60238133A (ja) 1984-04-16 1984-04-16 真空処理装置

Country Status (1)

Country Link
JP (1) JPS60238133A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019183213A (ja) * 2018-04-05 2019-10-24 株式会社クラフト スパッタリング装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2631763B2 (ja) * 1990-09-13 1997-07-16 日立電子エンジニアリング 株式会社 気相反応装置
US6899795B1 (en) 2000-01-18 2005-05-31 Unaxis Balzers Aktiengesellschaft Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
WO2001053561A1 (de) * 2000-01-18 2001-07-26 Unaxis Balzers Ag Sputterkammer sowie vakuumtransportkammer und vakuumbehandlungsanlagen mit solchen kammern
US6609877B1 (en) * 2000-10-04 2003-08-26 The Boc Group, Inc. Vacuum chamber load lock structure and article transport mechanism
JP4702867B2 (ja) * 2001-03-27 2011-06-15 芝浦メカトロニクス株式会社 真空処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019183213A (ja) * 2018-04-05 2019-10-24 株式会社クラフト スパッタリング装置

Also Published As

Publication number Publication date
JPS60238133A (ja) 1985-11-27

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