JPS6080772A - プロ−ブニ−ドル - Google Patents
プロ−ブニ−ドルInfo
- Publication number
- JPS6080772A JPS6080772A JP18869583A JP18869583A JPS6080772A JP S6080772 A JPS6080772 A JP S6080772A JP 18869583 A JP18869583 A JP 18869583A JP 18869583 A JP18869583 A JP 18869583A JP S6080772 A JPS6080772 A JP S6080772A
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- tip
- probe
- needle
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 25
- 238000012360 testing method Methods 0.000 claims abstract description 10
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 abstract description 5
- 229910001252 Pd alloy Inorganic materials 0.000 abstract description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052721 tungsten Inorganic materials 0.000 abstract description 2
- 239000010937 tungsten Substances 0.000 abstract description 2
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 241000282472 Canis lupus familiaris Species 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18869583A JPS6080772A (ja) | 1983-10-08 | 1983-10-08 | プロ−ブニ−ドル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18869583A JPS6080772A (ja) | 1983-10-08 | 1983-10-08 | プロ−ブニ−ドル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6080772A true JPS6080772A (ja) | 1985-05-08 |
| JPH0145029B2 JPH0145029B2 (enrdf_load_stackoverflow) | 1989-10-02 |
Family
ID=16228202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18869583A Granted JPS6080772A (ja) | 1983-10-08 | 1983-10-08 | プロ−ブニ−ドル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6080772A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61100138U (enrdf_load_stackoverflow) * | 1984-12-05 | 1986-06-26 | ||
| JPS6361965A (ja) * | 1986-09-03 | 1988-03-18 | Ricoh Co Ltd | パタ−ン基板の検査方法および装置 |
| JPS63128264A (ja) * | 1986-11-18 | 1988-05-31 | Nec Corp | プロ−ブ カ−ド |
| JPH02663U (enrdf_load_stackoverflow) * | 1988-06-13 | 1990-01-05 | ||
| JPH05102258A (ja) * | 1991-10-08 | 1993-04-23 | Nippon Maikuronikusu:Kk | 探 針 |
| JP2001311746A (ja) * | 2000-04-28 | 2001-11-09 | Mitsubishi Materials Corp | コンタクトプローブ及びプローブ装置 |
-
1983
- 1983-10-08 JP JP18869583A patent/JPS6080772A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61100138U (enrdf_load_stackoverflow) * | 1984-12-05 | 1986-06-26 | ||
| JPS6361965A (ja) * | 1986-09-03 | 1988-03-18 | Ricoh Co Ltd | パタ−ン基板の検査方法および装置 |
| JPS63128264A (ja) * | 1986-11-18 | 1988-05-31 | Nec Corp | プロ−ブ カ−ド |
| JPH02663U (enrdf_load_stackoverflow) * | 1988-06-13 | 1990-01-05 | ||
| JPH05102258A (ja) * | 1991-10-08 | 1993-04-23 | Nippon Maikuronikusu:Kk | 探 針 |
| JP2001311746A (ja) * | 2000-04-28 | 2001-11-09 | Mitsubishi Materials Corp | コンタクトプローブ及びプローブ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0145029B2 (enrdf_load_stackoverflow) | 1989-10-02 |
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