JPS61100138U - - Google Patents

Info

Publication number
JPS61100138U
JPS61100138U JP18527084U JP18527084U JPS61100138U JP S61100138 U JPS61100138 U JP S61100138U JP 18527084 U JP18527084 U JP 18527084U JP 18527084 U JP18527084 U JP 18527084U JP S61100138 U JPS61100138 U JP S61100138U
Authority
JP
Japan
Prior art keywords
wafer
prober
protrusions
stage
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18527084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331077Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984185270U priority Critical patent/JPH0331077Y2/ja
Publication of JPS61100138U publication Critical patent/JPS61100138U/ja
Application granted granted Critical
Publication of JPH0331077Y2 publication Critical patent/JPH0331077Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1984185270U 1984-12-05 1984-12-05 Expired JPH0331077Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984185270U JPH0331077Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984185270U JPH0331077Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS61100138U true JPS61100138U (enrdf_load_stackoverflow) 1986-06-26
JPH0331077Y2 JPH0331077Y2 (enrdf_load_stackoverflow) 1991-07-01

Family

ID=30742748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984185270U Expired JPH0331077Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH0331077Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010027864A (ja) * 2008-07-18 2010-02-04 Sumco Corp 半導体デバイスの製造方法
JP2015049137A (ja) * 2013-09-02 2015-03-16 三菱電機株式会社 半導体チップ試験装置及び方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4123701Y1 (enrdf_load_stackoverflow) * 1966-02-22 1966-12-02
JPS546867U (enrdf_load_stackoverflow) * 1977-06-16 1979-01-17
JPS56147076A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Characteristic testing electrode
JPS6080772A (ja) * 1983-10-08 1985-05-08 Rohm Co Ltd プロ−ブニ−ドル

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4123701Y1 (enrdf_load_stackoverflow) * 1966-02-22 1966-12-02
JPS546867U (enrdf_load_stackoverflow) * 1977-06-16 1979-01-17
JPS56147076A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Characteristic testing electrode
JPS6080772A (ja) * 1983-10-08 1985-05-08 Rohm Co Ltd プロ−ブニ−ドル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010027864A (ja) * 2008-07-18 2010-02-04 Sumco Corp 半導体デバイスの製造方法
JP2015049137A (ja) * 2013-09-02 2015-03-16 三菱電機株式会社 半導体チップ試験装置及び方法

Also Published As

Publication number Publication date
JPH0331077Y2 (enrdf_load_stackoverflow) 1991-07-01

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