JPS6074426A - 光励起プロセス装置 - Google Patents

光励起プロセス装置

Info

Publication number
JPS6074426A
JPS6074426A JP58179272A JP17927283A JPS6074426A JP S6074426 A JPS6074426 A JP S6074426A JP 58179272 A JP58179272 A JP 58179272A JP 17927283 A JP17927283 A JP 17927283A JP S6074426 A JPS6074426 A JP S6074426A
Authority
JP
Japan
Prior art keywords
discharge
reaction chamber
chamber
gas
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58179272A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241900B2 (show.php
Inventor
Toshio Hayashi
俊雄 林
Kenro Miyamura
賢郎 宮村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP58179272A priority Critical patent/JPS6074426A/ja
Publication of JPS6074426A publication Critical patent/JPS6074426A/ja
Publication of JPH0241900B2 publication Critical patent/JPH0241900B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/7618—
    • H10P72/7621—

Landscapes

  • Drying Of Semiconductors (AREA)
JP58179272A 1983-09-29 1983-09-29 光励起プロセス装置 Granted JPS6074426A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58179272A JPS6074426A (ja) 1983-09-29 1983-09-29 光励起プロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58179272A JPS6074426A (ja) 1983-09-29 1983-09-29 光励起プロセス装置

Publications (2)

Publication Number Publication Date
JPS6074426A true JPS6074426A (ja) 1985-04-26
JPH0241900B2 JPH0241900B2 (show.php) 1990-09-19

Family

ID=16062937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58179272A Granted JPS6074426A (ja) 1983-09-29 1983-09-29 光励起プロセス装置

Country Status (1)

Country Link
JP (1) JPS6074426A (show.php)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106618A (ja) * 1985-11-05 1987-05-18 Mitsubishi Electric Corp 光化学気相成長装置
JPH01292811A (ja) * 1988-05-20 1989-11-27 Sumitomo Electric Ind Ltd 気相成長方法及びその装置
WO2007088817A1 (ja) * 2006-01-31 2007-08-09 Tokyo Electron Limited 光源装置、基板処理装置、基板処理方法
JP2011054993A (ja) * 1996-02-22 2011-03-17 Sumitomo Precision Prod Co Ltd 誘導結合プラズマ・リアクタ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054172A (show.php) * 1973-08-22 1975-05-13
JPS5482876A (en) * 1977-12-15 1979-07-02 Mitsubishi Electric Corp Fluorescent lamp without electrode

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054172A (show.php) * 1973-08-22 1975-05-13
JPS5482876A (en) * 1977-12-15 1979-07-02 Mitsubishi Electric Corp Fluorescent lamp without electrode

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106618A (ja) * 1985-11-05 1987-05-18 Mitsubishi Electric Corp 光化学気相成長装置
JPH01292811A (ja) * 1988-05-20 1989-11-27 Sumitomo Electric Ind Ltd 気相成長方法及びその装置
JP2011054993A (ja) * 1996-02-22 2011-03-17 Sumitomo Precision Prod Co Ltd 誘導結合プラズマ・リアクタ
WO2007088817A1 (ja) * 2006-01-31 2007-08-09 Tokyo Electron Limited 光源装置、基板処理装置、基板処理方法
JP2007207915A (ja) * 2006-01-31 2007-08-16 Tokyo Electron Ltd 光源装置、基板処理装置、基板処理方法
KR100945316B1 (ko) * 2006-01-31 2010-03-05 도쿄엘렉트론가부시키가이샤 광원 장치, 기판 처리 장치, 기판 처리 방법

Also Published As

Publication number Publication date
JPH0241900B2 (show.php) 1990-09-19

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