JPS6065967U - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JPS6065967U
JPS6065967U JP15919283U JP15919283U JPS6065967U JP S6065967 U JPS6065967 U JP S6065967U JP 15919283 U JP15919283 U JP 15919283U JP 15919283 U JP15919283 U JP 15919283U JP S6065967 U JPS6065967 U JP S6065967U
Authority
JP
Japan
Prior art keywords
sample
auxiliary lens
lens
electron beam
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15919283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228609Y2 (enrdf_load_stackoverflow
Inventor
田形　昭次郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP15919283U priority Critical patent/JPS6065967U/ja
Publication of JPS6065967U publication Critical patent/JPS6065967U/ja
Application granted granted Critical
Publication of JPH0228609Y2 publication Critical patent/JPH0228609Y2/ja
Granted legal-status Critical Current

Links

JP15919283U 1983-10-14 1983-10-14 走査電子顕微鏡 Granted JPS6065967U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15919283U JPS6065967U (ja) 1983-10-14 1983-10-14 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15919283U JPS6065967U (ja) 1983-10-14 1983-10-14 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS6065967U true JPS6065967U (ja) 1985-05-10
JPH0228609Y2 JPH0228609Y2 (enrdf_load_stackoverflow) 1990-07-31

Family

ID=30350501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15919283U Granted JPS6065967U (ja) 1983-10-14 1983-10-14 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6065967U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007020866A1 (ja) * 2005-08-12 2007-02-22 Ebara Corporation 検出装置及び検査装置
WO2011055520A1 (ja) * 2009-11-06 2011-05-12 株式会社日立ハイテクノロジーズ 電子顕微鏡
JP2018206589A (ja) * 2017-06-02 2018-12-27 日本電子株式会社 走査電子顕微鏡

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007020866A1 (ja) * 2005-08-12 2007-02-22 Ebara Corporation 検出装置及び検査装置
JP2007048686A (ja) * 2005-08-12 2007-02-22 Ebara Corp 検出装置及び検査装置
US7928382B2 (en) 2005-08-12 2011-04-19 Ebara Corporation Detector and inspecting apparatus
US8431892B2 (en) 2005-08-12 2013-04-30 Ebara Corporation Detector and inspecting apparatus
US8796621B2 (en) 2005-08-12 2014-08-05 Ebara Corporation Detector and inspecting apparatus
WO2011055520A1 (ja) * 2009-11-06 2011-05-12 株式会社日立ハイテクノロジーズ 電子顕微鏡
JP5439498B2 (ja) * 2009-11-06 2014-03-12 株式会社日立ハイテクノロジーズ 電子顕微鏡
US8742342B2 (en) 2009-11-06 2014-06-03 Hitachi High-Technologies Corporation Electron microscope
JP2018206589A (ja) * 2017-06-02 2018-12-27 日本電子株式会社 走査電子顕微鏡

Also Published As

Publication number Publication date
JPH0228609Y2 (enrdf_load_stackoverflow) 1990-07-31

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