JPS6065967U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS6065967U JPS6065967U JP15919283U JP15919283U JPS6065967U JP S6065967 U JPS6065967 U JP S6065967U JP 15919283 U JP15919283 U JP 15919283U JP 15919283 U JP15919283 U JP 15919283U JP S6065967 U JPS6065967 U JP S6065967U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- auxiliary lens
- lens
- electron beam
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の第１の型の装置を示すための図、第２図
は従来の第２の型の装置を示すための図、第３図は本考
案の一実施例の全体図を示すための図、第４図は電子増
倍検出器を説明するための図、第５図は小孔９ａを説明
するための図、第６図は一体化構造物の対物レンズ６へ
の装着機構を説明するための図、第７図は本考案の他の
実施例を示すための図、第８図は本考案の更に他の実施
例を示すための図である。Fig. 1 is a diagram showing a conventional first type device, Fig. 2 is a diagram showing a conventional second type device, and Fig. 3 is an overall view of an embodiment of the present invention. FIG. 4 is a diagram for explaining the electron multiplier detector, FIG. 5 is a diagram for explaining the small hole 9a, and FIG. 6 is a diagram for explaining the attachment of the integrated structure to the objective lens 6. FIG. 7 is a diagram for explaining the mechanism, FIG. 7 is a diagram for showing another embodiment of the present invention, and FIG. 8 is a diagram for showing still another embodiment of the present invention.
Claims (1)
電子線の照射によって試料より発生する二次電子等を検
出するため対物レンズと試料との間に配置された検出器
とを備えた装置において、補助レンズと、該補助レンズ
の電子線通過孔に沿って飛行して来た試料よりの二次電
子を検出するため該補助レンズの上側端面に取り付けら
れた薄型の電子増倍検出器と、該補助レンズと電子増倍
増幅検出器の一体化構造体を対物レンズの下端面に着脱
自在にするため光軸に略垂直な方向に移動するための手
段とを具備することを特徴とする走査電子顕微鏡。an objective lens for focusing and irradiating the electron beam onto the sample;
In an apparatus equipped with a detector arranged between an objective lens and a sample to detect secondary electrons etc. generated from the sample by irradiation with an electron beam, an auxiliary lens and an electron beam passage hole of the auxiliary lens are provided. A thin electron multiplier detector attached to the upper end surface of the auxiliary lens to detect secondary electrons from the sample that has flown along the auxiliary lens, and an integrated structure of the auxiliary lens and the electron multiplier amplification detector. 1. A scanning electron microscope, comprising means for moving the body in a direction substantially perpendicular to the optical axis in order to allow the body to be attached to and detached from the lower end surface of the objective lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919283U JPS6065967U (en) | 1983-10-14 | 1983-10-14 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15919283U JPS6065967U (en) | 1983-10-14 | 1983-10-14 | scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6065967U true JPS6065967U (en) | 1985-05-10 |
| JPH0228609Y2 JPH0228609Y2 (en) | 1990-07-31 |
Family
ID=30350501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15919283U Granted JPS6065967U (en) | 1983-10-14 | 1983-10-14 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6065967U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007020866A1 (en) * | 2005-08-12 | 2007-02-22 | Ebara Corporation | Detection device and inspection device |
| WO2011055520A1 (en) * | 2009-11-06 | 2011-05-12 | 株式会社日立ハイテクノロジーズ | Electron microscope |
| JP2018206589A (en) * | 2017-06-02 | 2018-12-27 | 日本電子株式会社 | Scanning electron microscope |
-
1983
- 1983-10-14 JP JP15919283U patent/JPS6065967U/en active Granted
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007020866A1 (en) * | 2005-08-12 | 2007-02-22 | Ebara Corporation | Detection device and inspection device |
| JP2007048686A (en) * | 2005-08-12 | 2007-02-22 | Ebara Corp | Detection device and inspection device |
| US7928382B2 (en) | 2005-08-12 | 2011-04-19 | Ebara Corporation | Detector and inspecting apparatus |
| US8431892B2 (en) | 2005-08-12 | 2013-04-30 | Ebara Corporation | Detector and inspecting apparatus |
| US8796621B2 (en) | 2005-08-12 | 2014-08-05 | Ebara Corporation | Detector and inspecting apparatus |
| WO2011055520A1 (en) * | 2009-11-06 | 2011-05-12 | 株式会社日立ハイテクノロジーズ | Electron microscope |
| JP5439498B2 (en) * | 2009-11-06 | 2014-03-12 | 株式会社日立ハイテクノロジーズ | electronic microscope |
| US8742342B2 (en) | 2009-11-06 | 2014-06-03 | Hitachi High-Technologies Corporation | Electron microscope |
| JP2018206589A (en) * | 2017-06-02 | 2018-12-27 | 日本電子株式会社 | Scanning electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0228609Y2 (en) | 1990-07-31 |
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