JPS614348U - Cathodoluminescence device - Google Patents
Cathodoluminescence deviceInfo
- Publication number
- JPS614348U JPS614348U JP8805184U JP8805184U JPS614348U JP S614348 U JPS614348 U JP S614348U JP 8805184 U JP8805184 U JP 8805184U JP 8805184 U JP8805184 U JP 8805184U JP S614348 U JPS614348 U JP S614348U
- Authority
- JP
- Japan
- Prior art keywords
- cassodoluminescence
- ellipsoidal mirror
- abstract
- cathodoluminescence device
- cathodoluminescence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の動作鵬理説明図、第２図は本考案の一
実施例を示す平面図である。
１・・・入射電子ビーム、２・・・対物レンズ、−３・
・・試料、４・・・ライトパイプ、５・・・立体角、６
・・・ホトマル、７・・・楕円面鏡、８・・・ハンドル
、９・・・親、ジ、１０・・・プリアンプ、１１・・・
試料室。FIG. 1 is a diagram illustrating the operation of the present invention, and FIG. 2 is a plan view showing an embodiment of the present invention. 1... Incident electron beam, 2... Objective lens, -3.
...Sample, 4...Light pipe, 5...Solid angle, 6
... Photomaru, 7... Elliptical mirror, 8... Handle, 9... Parent, Ji, 10... Preamplifier, 11...
Sample room.
Claims (1)
る走査形電子顕微鏡のカソ一ドルミネツセンス装置にお
いて、カソ一ドルミネツセンスをホトマルに導木するラ
イトパイプの先端に楕円面鏡を設けた一造を有すること
を特徴とする−カソ一ドルミネツセンス装置。 ２ 実用新案登録請求の範囲第１項において、楕円面鏡
は真空外より移動できる構造を有することを特徴とする
カソ一ドルミネツセンス装置。[Scope of Claim for Utility Model Registration] 1. In a cassodoluminescence device for a scanning electron microscope that detects cassodoluminescence generated from a sample, an ellipsoidal mirror is provided at the tip of a light pipe that guides the cassodoluminescence into a photon. - A cassodoluminescence device, characterized in that it has one structure. 2. The cassodoluminescence device according to claim 1, wherein the ellipsoidal mirror has a structure that allows it to be moved from outside the vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8805184U JPS614348U (en) | 1984-06-15 | 1984-06-15 | Cathodoluminescence device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8805184U JPS614348U (en) | 1984-06-15 | 1984-06-15 | Cathodoluminescence device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS614348U true JPS614348U (en) | 1986-01-11 |
Family
ID=30640826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8805184U Pending JPS614348U (en) | 1984-06-15 | 1984-06-15 | Cathodoluminescence device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS614348U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004503062A (en) * | 2000-07-07 | 2004-01-29 | エルエーオー・エレクトローネンミクロスコピイ・ゲーエムベーハー | Detector for changing pressure region and electron microscope equipped with such a detector |
| JP2016054152A (en) * | 2010-05-27 | 2016-04-14 | サントル・ナショナル・ドゥ・ラ・ルシェルシュ・シャンティフィクＣｅｎｔｒｅ Ｎａｔｉｏｎａｌ Ｄｅ Ｌａ Ｒｅｃｈｅｒｃｈｅ Ｓｃｉｅｎｔｉｆｉｑｕｅ | Flexible cathodoluminescence detection system and microscope employing such system |
-
1984
- 1984-06-15 JP JP8805184U patent/JPS614348U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004503062A (en) * | 2000-07-07 | 2004-01-29 | エルエーオー・エレクトローネンミクロスコピイ・ゲーエムベーハー | Detector for changing pressure region and electron microscope equipped with such a detector |
| JP2016054152A (en) * | 2010-05-27 | 2016-04-14 | サントル・ナショナル・ドゥ・ラ・ルシェルシュ・シャンティフィクＣｅｎｔｒｅ Ｎａｔｉｏｎａｌ Ｄｅ Ｌａ Ｒｅｃｈｅｒｃｈｅ Ｓｃｉｅｎｔｉｆｉｑｕｅ | Flexible cathodoluminescence detection system and microscope employing such system |
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