JPS59168954U - secondary electron detector - Google Patents
secondary electron detectorInfo
- Publication number
- JPS59168954U JPS59168954U JP6207383U JP6207383U JPS59168954U JP S59168954 U JPS59168954 U JP S59168954U JP 6207383 U JP6207383 U JP 6207383U JP 6207383 U JP6207383 U JP 6207383U JP S59168954 U JPS59168954 U JP S59168954U
- Authority
- JP
- Japan
- Prior art keywords
- electron detector
- secondary electron
- ground electrode
- electric field
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す見取図、第２図は接地
電極の説明図、第４図は本考案による二次電子検出器の
電界分布図、第３図は第４図と同等な電界分布を得るた
めに従来の二次電子検出器を傾斜させた時の電界分布図
である。
１・・・接地電極、２・・・シンチレータ−１３・・・
ライトガイド、４・・・フォトマルチプライヤ、５・・
・プリアンプ、６・・・対物レンズ、７、・・・試料、
８・・・試料室。Figure 1 is a sketch showing an embodiment of the present invention, Figure 2 is an explanatory diagram of the ground electrode, Figure 4 is an electric field distribution diagram of the secondary electron detector according to the present invention, and Figure 3 is equivalent to Figure 4. FIG. 2 is an electric field distribution diagram when a conventional secondary electron detector is tilted to obtain a uniform electric field distribution. 1...Ground electrode, 2...Scintillator-13...
Light guide, 4... Photo multiplier, 5...
・Preamplifier, 6...Objective lens, 7,...Sample,
8...Sample room.
Claims (1)
料上に走査し、この時該試料より発生する二次電子を検
出する二次電子検出器で、該二次電子を加速するための
電極と集束電界を作るための接地電極を持つ該二次電子
検出器において、該接地電極形状が円錐を対称軸に対し
斜めに切り切り口が楕円となることを特徴とする二次電
子検出器。 ２ 実用新案登録請求の範囲第１項において、該接地電
極の切り込む角度を変え、すなわち楕円の大きさを変え
電界形状を変えることを特徴と゛ する二次電子検出器
。[Claims for Utility Model Registration] 1. A secondary electron detector that focuses an electron beam using a focusing lens system, scans the electron beam on a sample, and detects secondary electrons generated from the sample at this time. The secondary electron detector has an electrode for accelerating secondary electrons and a ground electrode for creating a focusing electric field, and the ground electrode is characterized in that the shape of the ground electrode is a cone cut obliquely to the symmetry axis so that the cut end is an ellipse. Secondary electron detector. 2. A secondary electron detector according to claim 1 of the utility model registration, characterized in that the cutting angle of the ground electrode is changed, that is, the size of the ellipse is changed to change the shape of the electric field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6207383U JPS59168954U (en) | 1983-04-27 | 1983-04-27 | secondary electron detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6207383U JPS59168954U (en) | 1983-04-27 | 1983-04-27 | secondary electron detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59168954U true JPS59168954U (en) | 1984-11-12 |
Family
ID=30192274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6207383U Pending JPS59168954U (en) | 1983-04-27 | 1983-04-27 | secondary electron detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59168954U (en) |
-
1983
- 1983-04-27 JP JP6207383U patent/JPS59168954U/en active Pending
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