JPS58146347U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS58146347U JPS58146347U JP4298982U JP4298982U JPS58146347U JP S58146347 U JPS58146347 U JP S58146347U JP 4298982 U JP4298982 U JP 4298982U JP 4298982 U JP4298982 U JP 4298982U JP S58146347 U JPS58146347 U JP S58146347U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- scanning electron
- electron microscope
- support
- information signals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例装置の構成を示す図、第２図
は変形例の部分構成図である。
１ニスライドガラス、２：試料、７：表示装置、１５：
反射鏡、１６：試料室壁、１７：窓、１８：Ｌ／ランプ
１９：ランプ、２０：電子線通過口、２１：保持体、２
２：光検出器。FIG. 1 is a diagram showing the configuration of an apparatus according to an embodiment of the present invention, and FIG. 2 is a partial configuration diagram of a modified example. 1 varnished glass, 2: sample, 7: display device, 15:
Reflector, 16: Sample chamber wall, 17: Window, 18: L/lamp 19: Lamp, 20: Electron beam passage port, 21: Holder, 2
2: Photodetector.
Claims (1)
元的に走査し、走査に伴ない試料から発生した情報信号
を検出して表示手段へ送るようにした走査電子顕微鏡と
、試料を観察するために上記支持体の下方に設置された
光学顕微鏡と、該光学顕微鏡のための照明光を発生する
光源と、該照明光を試料に照射するために試料上方に配
置された反射鏡とを備えた装置において、前記光源位置
に光検出器を配置し得るようにしたことを特徴とする走
査電子顕微鏡。A scanning electron microscope that two-dimensionally scans a finely focused electron beam on a sample placed on a support, detects information signals generated from the sample during scanning, and sends the information signals to a display means; an optical microscope installed below the support for observing the sample; a light source that generates illumination light for the optical microscope; and a reflector placed above the sample to irradiate the sample with the illumination light. 1. A scanning electron microscope comprising a mirror, wherein a photodetector can be placed at the light source position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4298982U JPS58146347U (en) | 1982-03-26 | 1982-03-26 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4298982U JPS58146347U (en) | 1982-03-26 | 1982-03-26 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58146347U true JPS58146347U (en) | 1983-10-01 |
Family
ID=30054085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4298982U Pending JPS58146347U (en) | 1982-03-26 | 1982-03-26 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58146347U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020008538A (en) * | 2018-07-12 | 2020-01-16 | 株式会社堀場製作所 | Luminescence analyzing device |
-
1982
- 1982-03-26 JP JP4298982U patent/JPS58146347U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020008538A (en) * | 2018-07-12 | 2020-01-16 | 株式会社堀場製作所 | Luminescence analyzing device |
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