JPS58148866U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS58148866U JPS58148866U JP4554282U JP4554282U JPS58148866U JP S58148866 U JPS58148866 U JP S58148866U JP 4554282 U JP4554282 U JP 4554282U JP 4554282 U JP4554282 U JP 4554282U JP S58148866 U JPS58148866 U JP S58148866U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- scanning electron
- electron microscope
- support
- observation position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の構成を示す図、第２図は試
料部分の断面図、第３図はターレット部分の平面図であ
る。
４：電子銃、１４．１８：対物レンズ、１７：接眼レン
ズ、１９：ターレット、２０：回転軸、２１：マイクロ
スイッチ、２２：電源。FIG. 1 is a diagram showing the configuration of an embodiment of the present invention, FIG. 2 is a sectional view of a sample portion, and FIG. 3 is a plan view of a turret portion. 4: Electron gun, 14.18: Objective lens, 17: Eyepiece lens, 19: Turret, 20: Rotation axis, 21: Microswitch, 22: Power supply.
Claims (1)
すると共に二次元的に走査し、試料より発生する情報信
号を検出して表示手段へ送るようにした走査電子顕微鏡
と、上記試料を観察するために上記支持体の下方に配麿
された、複数の対物レンズと該複数の対物レンズを保持
し試料直下の観察位置へ選択的に移動させるためのター
レットとを有する光学顕微鏡とを備えた装置において、
前記対物レンズが観察位置にあるか否かを検出する手段
と、該検出手段の出力信号に基づいて電子線照射を停止
させる手段を設けたことを特徴とする走査電子顕微鏡。A scanning electron microscope that irradiates a sample placed on a support with a finely focused electron beam and scans it two-dimensionally, detects an information signal generated from the sample, and sends it to a display means; an optical microscope having a plurality of objective lenses arranged below the support for observing the sample and a turret for holding the plurality of objective lenses and selectively moving them to an observation position directly below the sample; In a device equipped with
A scanning electron microscope characterized by comprising: means for detecting whether the objective lens is at an observation position; and means for stopping electron beam irradiation based on an output signal of the detecting means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4554282U JPS58148866U (en) | 1982-03-30 | 1982-03-30 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4554282U JPS58148866U (en) | 1982-03-30 | 1982-03-30 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58148866U true JPS58148866U (en) | 1983-10-06 |
Family
ID=30056556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4554282U Pending JPS58148866U (en) | 1982-03-30 | 1982-03-30 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58148866U (en) |
-
1982
- 1982-03-30 JP JP4554282U patent/JPS58148866U/en active Pending
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